BaTiO3 Film Optical-Waveguide Prepared by Pulsed Laser Deposition
FX Wang,W Li,F Lu,H Hu,JM Wang,ZG Liu,Yong-Zhu
DOI: https://doi.org/10.1016/s0168-583x(02)00652-3
2002-01-01
Abstract:High quality BaTiO3 optical-waveguide thin films on MgO(100) substrate were fabricated successfully by using pulsed laser deposition technique. The properties of the samples were characterized by using Rutherford backscattering (RBS), X-ray diffraction, atomic force microscopy and prism coupling method. The RBS shows no obvious evidence for interdiffusion between the film and the substrate. The thickness of the film and the Ba/Ti ratio were calculated based on RBS to be 881 nm and 1.004, respectively. X-ray diffraction results show that the as-deposited BaTiO3 film is basically oriented polycrystalline, and strong (l00) peaks were revealed. The root mean square (rms) roughness of the film was evaluated to be 0.796 nm, this is only 0.1% of the film thickness. The bright TE (m=0,1,2,3) and TM (m=0,1,2,3) modes in the BaTiO3 film optical waveguide were observed.