Measurement of computer contact type interferometer on character of piezoelectric ceramic micro-displacement

Yu Zhu,Jinbang Chen,Rihong Zhu,Qing Wang,Lei Chen
1998-01-01
Abstract:The working principle of piezoelectric ceramic micro-displacement system was introduced, and based on it, a method of using computer contact type interferometer to measure the characteristic of micro-displacement was proposed. Its perfect software system can achieve automatic and intelligent measurement of piezoelectric ceramic micro-displacement. It has been used to measure a piezoelectric ceramic microactuator, the voltage-displacement curve and hysteresis curve were obtained. The accuracy and repeatability have reached 0.01μm.
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