Fabrication of X-ray mask by using diamond membrane

Wenhua Zhang,Guifu Ding,Qian Wang,Juntao Xu,Shoubai Zhang
1998-01-01
Abstract:The fabrication of X-ray mask is the key of LIGA technique. In the design given by the authors, diamond membrane is used as sustaining membrane and gold as absorbing structure. In order to enhance the bonding force between the sustaining membrane and absorbing structure, a thin film interlayer made of Ni alloy is used. The mask has good contrast effect. The process is simple and the finished product rate is high. Using diamond membrane to fabricate LIGA mask is proved to be a good method.
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