Study on microstructure of Ag-SiO2 nanometer composite thin films

Geyang Li,Liang Wu,Liuqiang Zhang,Xiaorong Shi,Pengxing Li
1997-01-01
Abstract:Ag-SiO2 nanometer composite thin films are prepared by magnetron sputtering. The microstructure consists of polycrystalline Ag and the mixture of polycrystalline Ag and amorphous SiO2. With the increase of SiO2 content at room temperature, the Ag crystals become smaller with meshed distribution and the resistivity of the film increases. These crystals are accumulated to form nanometer particles with the increase of substrate temperature.
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