Fabrication of CuO/ZuO heterojunction and its humidity sensing properties

Heying Wang,Yuanjin He
1997-01-01
Abstract:The heterojunction of CuO/ZuO bilayer thin film was grown on glass substrate by DC gas discharge activating reaction evaporation and photolithography. Such junctions exhibited a rectifying current-voltage character and their I-U curves varied with relative humidity at room temperature. The sensing properties could be attributed to the partial exposure to the atmosphere of the open junction, which was patterned by photolithography.
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