New Structure and Physical Characteristics of Intelligent Real-time Control on Optical Coating
shi jun xu,xiao ling ren,chun min zhang
DOI: https://doi.org/10.2991/icacsei.2013.113
2013-01-01
Abstract:Comparing general optical thin-film deposition systems, which present poor precision and automation level on monitoring film thickness, we proposed a new intelligent photoelectric-control-analysis coating system. The structure of the new system includes a four-light path photoelectric system matching with double-frequency modulation hardware equipment and a compound filteration-control system. The compound filteration-control system contains anti-disturbance circuit, analog circuits of multi-stage amplifier, symmetrical dual-lock-phase amplifier, digital division, anti-pulse-disturbance digital filter, linearization of digital display, algorithm of picking off singular data, and extremum-judgment algorithm. Experiments show that all functions of intelligent real-time monitoring film thickness are achieved. The physical characteristics, for example, the static and dynamic stabilities and the control thin-film thickness precision, are extremely increased. The resolution of digital display as per reflectivity is 0.02%. The duplication, i.e., standard deviation of monitoring thin-film thickness, is less than 0.50%. The S/N approaches to 1500. The linearity of drift is very high, and the static drift ratio is close to 1.63%/h. In conclusion, the new system has advantages of the high control precision for thin-film thickness and the favorable static and dynamic stabilities.