Abstract:Atmospheric Pressure Plasma Processing (APPP) has demonstrated that it can achieve high removal rate and induce no sub-surface damage on the silica based material of optical surface. Compared with traditional mechanical polishing and ion beam figuring, APPP technology is cost effective and very promising in the optics fabrication field. In principle, Atmospheric Pressure Plasma Processing can be described by the two-dimensional convolution equation with dwell time function and plasma removal function. Thus, dwell time function can be solved theoretically by the process of de-convolution, which is the essence of form control algorithm. First, this paper compares and analyzes common de-convolution algorithms by the simulated processing. From the simulation results, the algorithm based on the principle of image restoration has good solving speed, high calculation accuracy. Therefore, we choose it as the form control algorithm for Atmospheric Pressure Plasma Processing. However, the high temperature of plasma plume results in the non-linear relationship between the removal depth and time, further affecting the stability of the algorithm. Then, using the actual experiment data, we build the nonlinear relationship function model to compensate the heat effect in the algorithm. Finally, the modified algorithm is verified by the 7um uniform removal on the fused silica using Atmospheric Pressure Plasma Processing.

Development of LabVIEW-based automatic control system for tetrahedral amorphous carbon film preparation

Design and Development of the Control System for a Compact Carbon-14 AMS Facility

The Design And Development Of Adavnced Process Control Software Package Based On Opc Technology

Cutting Temperature and Force Data Acquisition and Measuring System Design in High Speed Machining

The Control System of a Magnetic Scattering Vacuum Three-target Film Coating Machine Realized by PLC

Design and Development of Computer Integrated Control System for Spheripol Propylene Polymerization Unit

Design of Computer Control System for Gas Phase Copolymerization of Olefin Based on PLC

DEVELOPMENT OF WALL THICKNESS CONTROLLING SYSTEM IN BLOW MOLDING MACHINE BASED ON LABVIEW

Development of Control System in Compact Single Stage Electrostatic Accelerator

Compositive Development on the Software for Data Logging,Data Processing and Controlling in the Gas-tight Sampling System

Automatic Control System Design and Realization of Latex Polymerization Process

Modeling Of Two-Dimensional Dynamic Temperature Distribution Of A Lpcvd Process And Control Design By Mpc

Measurement and control system for gas-tight deep-sea water sampler based on LabVIEW

Study of Form Control Algorithm in Atmospheric Pressure Plasma Processing

Design and development on automated control system of coated fuel particle fabrication process

Study and Development of Automatic Control System for Chamfering Machine Based on PLC

Development of a vacuum measurement and control system for quadrupole mass spectrometer

Instrumentation and control of an aerosol-assisted chemical vapor deposition system (AACVD)

Development Of Control System For Automatic Centrifugal Interpretoscope

A High-Speed Data Acquisition and Control System Based on LabVIEW for Long-Pulse Experiments

A Data Analysis and Evaluation System on LabVIEW