Development of a vacuum measurement and control system for quadrupole mass spectrometer

Kai LI,Ming LI,Zi-lan XIAO,Xing-bin TANG,Chao-gang WANG
DOI: https://doi.org/10.13385/j.cnki.vacuum.2017.02.08
IF: 4
2017-01-01
Vacuum
Abstract:This paper presents an vacuum measurement and control system which was based on ARM micro-controller.The system consists of ARM micro-controller,ADC acquisition circuit,CAN communication interface,HM-TRP wireless transceiver module,PC and vacuum gauges.When it was used in quadrupole mass spectrometer,it can measure vacuum of interface module,ion transport module and quadrupole module simultaneously.According to the vacuum values,cascade control between the instrument modules and process control of the instrument were achieved.Also,the vacuum values were sent to PC to display and were sent to display terminal by wireless module to display and control.The system was applied to PlasmaMS 300 of NCS Testing Technology Co.,Ltd.Experiments show that the system can accurately and stably monitor the vacuum of the instrument in real-time.It ensured the normal operation of the instrument and the safety of the critical components.At the same time,cascade control between the instrument modules and process control of the instrument improved the degree of automation and reliability of the instrument.
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