Diffractive grating of high efficiency produced by binary optics

Jin Zhou,WenQi Gao,XinFan Huang,BoRong Chen,Jie Chen,Wenping Chen

1995-01-01

Abstract:The fundamental principle and fabrication method for obtaining high efficiency diffractive gratings were described. The experimental result shows that the first-order diffractive efficiency of a four-level staircase grating reaches 68%.

What problem does this paper attempt to address?

Design of Large-Deflection-angle High-Diffraction-efficiency High-Dispersion Hybrid Gratings

Jianjie Dong,Cuifang Kuang,Chun Cao,Xiaoming Shen,Xianmeng Xia,Yiwei Qiu,Lingling Guan,Wenji Liu

DOI: https://doi.org/10.1016/j.optcom.2023.130083

IF: 2.4

2024-01-01

Optics Communications

Abstract:Gratings are key components in many optical systems such as spectrometers. Improving their dispersion is very important for their applications, but improving the single-order diffraction efficiency of an ultrahigh dispersion grating is still very challenging. Here, we propose an analytical approach for the design of a new type of grating named hybrid grating, which consists of a subwavelength grating and a non-subwavelength grating. The proposed analytical approach is based on a physical model in which the non-subwavelength grating acts as an ultrathin reflection grating and the subwavelength grating acts as an antireflection coating. Using the rigorous coupled-wave analysis and the finite-difference time-domain method, we numerically demonstrate that multiple hybrid gratings designed at different wavelengths using the proposed analytical approach show a diffraction efficiency of greater than 95 % in the -1st diffraction order for TE-polarized light, an angular dispersion of greater than 0.8 mrad/nm and a deflection angle of greater than 80 degrees. Furthermore, we numerically demonstrate that by using a combined approach to optimize the parameters of a hybrid grating, the diffraction efficiency in the -1st diffraction order for TE-polarized light can be increased to more than 97 % under the condition that the angular dispersion and the deflection angle of the hybrid grating remain unchanged. Our work provides an avenue for rapid design of gratings with high angular dispersion, large deflection angle and high diffraction efficiency.
Diffraction Properties of Transmission Binary Blazed Grating

Hui-Jun Zhou,Qu-Quan Wang

IF: 0.6

2006-01-01

Optica Applicata

Abstract:The properties of binary blazed grating were theoretically analyzed with finite-difference time-domain (FDTD) method. The diffraction efficiencies and diffraction angles of -1, 0, and +1 order for the grating varying with wavelength, grating structure, and the etch depth were studied when the incident angle was 30 degrees. The numerical simulations revealed that the binary blazed grating presented high stability of diffraction efficiencies with wavelength shift.
Binary Approximate Structure of Blazed Grating

ZHOU Hui-Jun,Wang Qu-Quan

DOI: https://doi.org/10.3969/j.issn.1672-3392.2005.03.011

2005-01-01

Abstract:The blazed grating can be used to fabricate waveguide coupler with high efficiency. With FDTD method, the first order diffractive efficiency and diffraction angle of binary blazed grating with different structure are simulated. The result of the numerical simulation is of great important for the fabrication of binary blazed grating.
High Efficient Vertical Binary Blazed Grating Coupler for Chip Level Optical Interconnections

Li Yu,Lu Liu,Zhiping Zhou,Xingjun Wang

DOI: https://doi.org/10.1364/cleo_at.2014.jw2a.46

2014-01-01

Abstract:A high-efficiency vertical binary blazed grating coupler is proposed. An 83% of efficiency and 65nm 3dB bandwidth are demonstrated. The tolerance of incident angle is 11.5 degrees.
Efficient and perfectly vertical binary blazed grating coupler with a slit

Zhe Ji,Shi-ru Fu,Dong Li,Ying-zhan Yan,Lin-tong Yan,Da-gong Jia

DOI: https://doi.org/10.1117/1.oe.62.9.097101

IF: 1.3

2023-09-08

Optical Engineering

Abstract:The eigenmode expansion method is applied to discretize the stepped shine grating into a binary shine grating. Various strategies that increase the directionality of the coupling efficiency have been optimized and replicated using this binary shining grating. We discussed and analyzed the impact of distributed Bragg reflectors, slits, and metal reflectors on the coupling efficiency of grating couplers. A metal reflector and slit were included in the design of a binary shine grating coupler. The coupling efficiency from the fiber to the waveguide of vertically incident electrically polarized light is 75.07% at 1600 nm. A 3 dB bandwidth of 77 nm from 1554 to 1631 nm is obtained.

optics
High-efficiency Broadband Polarization-Independent Binary Fused Silica Gratings for Large Astronomical Telescopes.

Yanan Wang,Zhiwen Chen,Maoqi Cai,Keqiang Qiu,Zhengkun Liu,Qingfeng Zhu,Yilin Hong

DOI: https://doi.org/10.1364/ao.439287

IF: 1.9

2021-01-01

Applied Optics

Abstract:The binary fused silica gratings (BFSGs) with high diffraction efficiency are presented for large astronomical ground-based telescopes. Calculations demonstrate that the BFSGs could obtain high diffraction efficiency in a wider wavelength range and angle of incident (AOI) range compared with volume phase holographic gratings. Several gratings with a size of 60mm×60mm have been fabricated by holographic lithography and reactive ion-beam etching technology. The measured peak diffraction efficiency reaches 94%, and results show that there are 130 nm wavelength bandwidth and 12° AOI bandwidth in which diffraction efficiency is higher than 70%. The stray light causes the diffraction efficiency to decrease by about 0.48%. All measurements have indicated good consistency with the simulation results.
The Optimization Design of Broadband Mid-Ir Grating

Fan Shuwei,Bai Liang,Zhou Qinghua

DOI: https://doi.org/10.1117/12.896269

2011-01-01

Abstract:The broadband mid-IR grating is required in the infrared spectrophotometer to keep the instrument compact. In this paper the optimization design of a type of broadband grating is studied by the rigorous diffraction grating electromagnetic theory. As a differential vector method, the rigorous coupled wave analysis (RCWA) has been widely used for the analysis and the design of diffractive structures. In this paper, firstly, the diffraction efficiency properties of the traditional broadband dual-blaze grating were analyzed by RCWA. Then a simple structure grating with broadband spectrum can be obtained to the dual-blaze grating. It is interesting that the designed grating only had one blazed angle which is more easily to made compared to dual-blaze grating. The optimization grating structure parameters were given. According to our design example of broadband, mid-IR metal grating, the grating with grating period 10.0 mu m and blazed angle 22 degree can obtain more than 80% diffraction efficiency within the whole broadest spectrum 8 similar to 18 mu m. The optimization design result demonstrates this simple structure grating is with broadband spectrum and more easily to produce than the dual-blaze gratings.
Manufacturing of High Efficient Holographic Diffraction Gratings

ZHAO Bo,QI Xiang-dong

DOI: https://doi.org/10.3321/j.issn:1004-924x.2001.02.003

2001-01-01

Abstract:WT5BZ]In light of the manufacturing principles of holographic diffraction gratings, the paper presents a main method of manufacturing the holographic gratings. In comparison with ruling gratings, the holographic diffraction gratings have many advantages. Using the coupling wave theory and ion etching, the design and efficiency of the gratings have been optimized and improved, respectively. The paper also gives various key technologies in manufacturing high efficient holographic diffraction gratings in detail. [WT5HZ]
High-Efficiency Unidirectional Dual-Wavelength-Band Grating Coupler with 1D Subwavelength Structure

Haoyang Tan,Baobao Chen,Yi Zhao,Shiming Gao,Xiaowei Guan

DOI: https://doi.org/10.1109/lpt.2023.3326185

IF: 2.6

2023-01-01

IEEE Photonics Technology Letters

Abstract:A unidirectional dual-wavelength-band grating coupler with one-dimensional (1D) subwavelength structures is proposed and experimentally demonstrated. Inverse optimization method is used for the design and the grating coupler fabricated on the silicon-on-insulator chip can achieve efficient fiber-chip coupling simultaneously in the O-band and the L-band. The peak coupling efficiencies in the two bands are measured to be 19.7% and 19.5% with 3-dB bandwidths of 27 and 38-nm, respectively.
Three-layer high-efficiency wideband metal-mirror-based grating

Jimin Fang,Bo Wang,Chen Fu,Sufang Yin,Ziming Meng,Zhaogang Nie,Xiangjun Xing,Li Chen,Liang Lei,Jinyun Zhou

2020-01-01

Journal of optoelectronics and advanced materials

Abstract:A novel wideband three-layer high-efficiency metal-mirror-based grating is designed and investigated. It consists of an Ag slab and a three-layer rectangular-groove dielectric-grating structure. Both TE and TM polarizations exhibit high efficiency in -1st order with good angular bandwidth and spectral bandwidth. Compared with the reported high-efficiency grating, the efficiency can be improved. Moreover, a wide spectral width of 150 nm and a broad angular width of 5.6 degrees can be shown. The modal method and rigorous coupled-wave analysis are used together to study grating parameters in this optimization.
Improving the Optical Subdivision Ability of a Grating Interferometer Via Double-Row Reverse Blazed Gratings

Zhenghui Zhang,Dong Niu,Guobo Zhao,Yaowen Ban,Xunhan Wang,Peng Wei,Weitao Jiang,Jinju Chen,Hongzhong Liu

DOI: https://doi.org/10.1016/j.optlaseng.2023.107676

IF: 5.666

2023-01-01

Optics and Lasers in Engineering

Abstract:In this paper, a grating interferometer with higher optical subdivision ability is presented based on a reasonable configuration for blazed gratings. The proposed grating interferometer is characterized by the inverse side-by-side coupling of two blazed gratings. Because blazed grating has great diffractive efficiency at a specific diffraction order, this configuration allows for high optical subdivision by increasing diffraction times on the grating's surface. The operating principle of the proposed method is described in detail, and the corresponding experiment is carried out to evaluate its availability. The results show that 16 times optical subdivision can be realized, which means that we can achieve higher measurement resolution and accuracy for grating interferometers. It is relatively rare to employ blazed gratings as scale gratings to quantify displacement, and we anticipate that the construction of double-row reverse blazed gratings will establish the groundwork for further exploration of the grating interferometer's precision.
Fabrication of a New Type of Transmission Grating with Holography Interferometry and Wet Anisotropic Etching

Yong Chen,Keqiang Qiu,Xiangdong Xu,Yilin Hong,Zhenkun Liu,Ying Liu,Shaojun Fu

DOI: https://doi.org/10.1117/12.971424

2012-01-01

Abstract:As a new type of grating, the freestanding blazed transmission grating combines the advantages of traditional transmission gratings (low mass, relaxed alignment and flatness figure insensitivity) with those of reflection gratings (high broadband diffraction efficiency, high spectral resolution). A freestanding blazed transmission grating with period of 1μm was successfully fabricated by holographic lithography and anisotropic wet etching of silicon. The duty cycle is about 0.13. The aspect ratio of a single grating bar is about 77. The thickness is 10μm and the open area fraction is about 58.8%. The size of a single die is 15mm×15mm divided into four 5mm ×5mm windows. The diffraction efficiency of the grating was measured at the National Synchrotron Radiation Laboratory in the wavelength region of 5-50nm. The results show a strong blazing effect in the direction of specular reflection from mirror-like grating sidewalls, as expected.
Diffraction efficiency of a perfectly conducting multilevel grating

Jianchuan Shi,Shen Li,Shenggang Liu

1997-01-01

Abstract:The diffraction efficiency of infinite conductivity multilevel grating was treated by solving Maxwell's equations numerically. The diffraction efficiency problem was solved by using mode matching method on the boundary surface, which was proposed by Petit. Many important optimization results for engineering design were obtained. By optimization a grating with diffraction efficiency higher than 80% is achieved.
High efficiency binary blazed grating coupler for perfectly-vertical and near-vertical coupling in chip level optical interconnections

li yu,lu liu,zhiping zhou,xingjun wang

DOI: https://doi.org/10.1016/j.optcom.2015.06.003

IF: 2.4

2015-01-01

Optics Communications

Abstract:The high-efficiency binary blazed grating couplers with perfectly vertical and nearly vertical coupling are proposed. The efficiencies of them are much higher than those of other types of grating couplers without bottom mirrors under vertical and oblique incidence respectively. For perfectly vertical coupler with transverse-electric polarized incident light, the coupling efficiency, which is defined as the ratio between the power coupled to the fundamental mode of the chip waveguide and that carried by the fundamental mode of the input optical fiber, is 75%, while the nearly vertical coupler with the incident angle of 10.2° has a coupling efficiency of 84%. Rigorous coupled-wave diffraction analysis and a complete optimization method have been used to make the optimal design valid and unique.
Optimized Design Of Phase Gratings And Analysis Of Diffractive Efficiency

Xm Qi,Tz Shen,Yq Gao,Hb Lu,Xj Zhu,Q Jin

2004-01-01

Abstract:To simplify the analysis of diffractive optical elements (DOE) and enlarge the adaptability of the method, a new model for DOE analysis is constructed by means of integration of the optical path difference (OPD). A phase grating is used as an example of application. The difference between the OPD model and the angular spectrum (AS) model is theoretically analyzed and compared through computer simulation. With the OPD model, a conclusion has been found that, there is a deviation between the blazed phase depth of the grating level computed respectively with the OPD model and the AS model. Moreover, the deviation increases with the decrease of the grating period. Taking example for two levels, the conclusion is proved by the results of rigorous coupled-wave vector diffraction theory. When the grating period decreases to two times of wavelength, the diffractive efficiency of the result designed with OPD increases 2 percent, which shows that the OPD model is more accurate than the AS model. In the end, a revised formula of the AS model is given.
Diffraction efficiency management by complex binary gratings

Dafne Amaya,Edgar Rueda,Pablo Vaveliuk

DOI: https://doi.org/10.1364/ol.531872

IF: 3.6

2024-09-19

Optics Letters

Abstract:Dafne Amaya, Edgar Rueda, Pablo Vaveliuk The diffraction efficiencies of a complex binary diffraction grating with a rectangular profile are controlled through the steps' ... [Opt. Lett. 49, 5371-5374 (2024)]

optics
High-efficiency Visible and Near-Infrared Transmission Gratings in Fused Silica for Astronomical Ground-Based Telescope Spectrographs

Yanan Wang,Zhiwen Chen,Ruizhi Li,Tao Ren,Keqiang Qiu,Zhengkun Liu,Yilin Hong,Ying Liu

DOI: https://doi.org/10.1117/12.2601658

2021-01-01

Abstract:We report on high-efficiency visible and near-infrared transmission gratings in fused silica generated by holographic recording and reactive ion beam etching technology. At a wavelength of 740 nm, near 100% diffraction efficiency is achieved under Littrow conditions. The design is based on the phenomenon of the high aspect ratio gratings by using the rigorous coupled wave analysis. A binary grating with the optimum grating period of 740 nm and groove depth of 1.55 had been fabricated in the paper. The grating wavelength bandwidth and angular bandwidth are extremely enhanced compared with conventional volume phase holographic gratings, making these gratings the key elements in high-resolution astronomical ground-based telescope spectrographs.
High-efficiency, broad-bandwidth metal/multilayerdielectric gratings

Heyuan Guan,Hui Chen,Jianbo Wu,Yunxia Jin,Fanyu Kong,Shijie Liu,Kui Yi,Jianda Shao

DOI: https://doi.org/10.1364/OL.39.000170

IF: 3.6

2014-01-01

Optics Letters

Abstract:We report on an 800 nm center-wavelength metal/multilayer-dielectric grating (MMDG) with broadband, high diffraction efficiency. The trapezoidal grating ridge consists of an HfO2 layer sandwiched between two SiO2 films. Combining the advantages of SiO2 and HfO2, the grating ridge reduces the difficulties of grating ridge attainment. For such a configuration, high-performance MMDG can be successfully fabricated using the existing technology. Experimentally we demonstrated a 163 nm bandwidth MMDG with -1st-order diffraction efficiency greater than 90%. The fabricated MMDG achieved high performance as the design with large fabrication tolerances. (C) 2013 Optical Society of America
Study of the Diffraction Grating Designed Based on the Bragg Reflection Structure

Li Bao,Zhu Jing-Ping,Du Bing-Zheng

DOI: https://doi.org/10.7498/aps.63.194209

IF: 0.906

2014-01-01

Acta Physica Sinica

Abstract:Based on the fact that Bragg reflection grating (BRG) is a special case of one-dimensional photonic crystal, we may apply the one-dimensional photonic crystal band gap theory to design the BRG. OptiFDTD is used to simulate both the width error and tilt angle error in BRG. It turns out that the diffraction efficiency will stay high at the 10% width error or the 10° tilt angle error of the Bragg grating. These indicate that the BRG has a high fabrication tolerance. One model of a Bragg diffraction double-grating in the Rowland circle structure is proposed based on the one-dimensional photonic crystal band gap theory for achieving the two-band spectral diffraction. Result shows that the diffraction efficiency of the two incident bands can be as high as 70% when the first set of Bragg grating periods is 6 layers while the second is 10. It is significantly higher than the traditional deeply etched diffraction grating. This is the foundation of a new type of EDG-WDMer with its advantages being of small size and high diffraction efficiency. It may have great potentiality for developing high diffraction efficiency dense wavelength division multiplexer in the future.
Binary Sub-Wavelength Grating with Dynamic Sub-Period

ZP Zhou

DOI: https://doi.org/10.1117/12.221251

1995-01-01

Abstract:The discussion on binary subwavelength gratings has recently been increased due to its simple fabrication procedure and potential applications in a variety of optoelectronic fields. Most designs of binary subwavelength gratings have been confined in the way that the grating ridges and/or channels are chirped and the defined grating period does not change during the design process. For some applications (e.g. interconnections), however, a dynamic diffraction pattern may be more desirable. In these cases, the variation of the diffraction angle and/or multiple diffraction beam pattern may be required. Therefor the rearrangement of the grating ridges and/or channels becomes a necessary. The newly arranged profile of the grating ridges and/or channels may be total different from the original one and may need to be changed into another profile later. This paper proposes a design method which optimize the diffraction efficiency at a desired angle and/or optimize the diffraction efficiencies at a multiangle pattern by forming a dynamic 'subperiod' within the initial defined grating period. Some design examples have been provided to prove the design concept.

Diffractive grating of high efficiency produced by binary optics

Design of Large-Deflection-angle High-Diffraction-efficiency High-Dispersion Hybrid Gratings

Diffraction Properties of Transmission Binary Blazed Grating

Binary Approximate Structure of Blazed Grating

High Efficient Vertical Binary Blazed Grating Coupler for Chip Level Optical Interconnections

Efficient and perfectly vertical binary blazed grating coupler with a slit

High-efficiency Broadband Polarization-Independent Binary Fused Silica Gratings for Large Astronomical Telescopes.

The Optimization Design of Broadband Mid-Ir Grating

Manufacturing of High Efficient Holographic Diffraction Gratings

High-Efficiency Unidirectional Dual-Wavelength-Band Grating Coupler with 1D Subwavelength Structure

Three-layer high-efficiency wideband metal-mirror-based grating

Improving the Optical Subdivision Ability of a Grating Interferometer Via Double-Row Reverse Blazed Gratings

Fabrication of a New Type of Transmission Grating with Holography Interferometry and Wet Anisotropic Etching

Diffraction efficiency of a perfectly conducting multilevel grating

High efficiency binary blazed grating coupler for perfectly-vertical and near-vertical coupling in chip level optical interconnections

Optimized Design Of Phase Gratings And Analysis Of Diffractive Efficiency

Diffraction efficiency management by complex binary gratings

High-efficiency Visible and Near-Infrared Transmission Gratings in Fused Silica for Astronomical Ground-Based Telescope Spectrographs

High-efficiency, broad-bandwidth metal/multilayerdielectric gratings

Study of the Diffraction Grating Designed Based on the Bragg Reflection Structure

Binary Sub-Wavelength Grating with Dynamic Sub-Period