Microfabrication and Post-Processing Technologies of Terahertz Vacuum Electronic Device

陆希成,童长江,王建国,李小泽,王光强,李爽,王雪锋
DOI: https://doi.org/10.3969/j.issn.1672-7126.2013.06.02
2013-01-01
Abstract:The latest development in the micro-fabrication and post-processing technologies of the terahertz vacuum electronic device (TVEDs) was tentatively reviewed in a thought provoking way. The discussions with specific examples focused on the strengths and weaknesses and applications of a variety of the widely used, state-of-the-art micro-fabrication methods and tools, such as the micromachining, micro-electric discharge machining (μEDM), lithographie galanoformung, abformung (LIGA)/ultraviolet (UV)-LIGA, and deep reactive ion etching. In addition, the impacts of the major post-processing technologies, including rinsing, cleaning, and chemical polishing of surfaces, on the surface properties of the TVEDs, was also briefly discussed.
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