A Study of Copper Oxide Based Resistive Switching Memory by Conductive Atom Force Microscope

Qianfei Zhou,Qian Lu,Xin Zhang,Yali Song,Yin,Xiaojing Wu
DOI: https://doi.org/10.1016/j.apsusc.2013.01.217
IF: 6.7
2013-01-01
Applied Surface Science
Abstract:A copper oxide (CuxO) layer was formed by applying plasma oxidization on a copper film grown on a Si substrate. Pt deposited on this CuxO layer then function as the top electrode to form a Pt/CuxO/Cu structure. A device created with this structure exhibited a forming-free bipolar resistive switching property. Conductive atom force microscope (C-AFM) was employed to investigate the nanoscale electrical properties of the device. Based on I-V curve analysis, it was found that the Poole-Frankel and conducting filaments models were suitable for the present device. C-AFM analysis for the sample indicated that the random formation/rupture of conducting paths in the CuxO layer may play a key role for the device instability in high resistance state. (C) 2013 Elsevier B.V. All rights reserved.
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