Programmable Complementary Resistive Switching Behaviours of a Plasma-Oxidised Titanium Oxide Nanolayer

Guangsheng Tang,Fei Zeng,Chao Chen,Hongyan Liu,Shuang Gao,Cheng Song,Yisong Lin,Guang Chen,Feng Pan
DOI: https://doi.org/10.1039/c2nr32743k
IF: 6.7
2013-01-01
Nanoscale
Abstract:Through the one-step plasma oxidation of TiN thin films at room temperature (a simple semiconductor technology compatible method), a partly oxidised structure of titanium oxynitride (TiNxOy) with a TiO2-x nanolayer on top has been prepared for non-volatile resistive switching memory devices. The fabricated Pt/TiO2-x/TiNxOy/TiN memory devices demonstrate complementary resistive switching behaviours within an operation voltage of 1 V. The complementary resistive switching behaviours can be explained by redistribution of the oxygen vacancies between the Pt/TiO2-x top interface and the TiO2-x/TiNxOy bottom interface in the TiO2-x nanolayer. A model concerning the resistive switching mechanism as well as a recover program of a failed device is also proposed. Our work provides a possible cost-efficient solution to suppress the sneak-path problem in nanoscale crossbar memory arrays.
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