System-level simulation of levitation control for a micromachined electrostatically suspended gyroscope

XIAO Qi-jun,LI Sheng-yong,CHEN Wen-yuan,LIU Chao-ying,Feng Cui,Wei Huang,CUI Hai-ning
2013-01-01
Abstract:This paper presents a novel electrostatically suspended gyroscope based on MEMS technology, which can measure dual-axis angular velocity and tri-axis linear acceleration. It adopts the force balance and torque balance ways to measure the linear acceleration and angular velocity input by the shell. It keeps the rotor at the zero position by close-loop control, and the control voltage reflects the input linear acceleration and angular velocity. An analogue PID control strategy based on non-centralized control is given to realize levitation control. A mechanic hybrid electronics model is constructed by software Coventorware, which takes account of the construction, circuit and control in a whole model. The initial levitation and linear acceleration input simulation show that the system-level simulation has the merit of fast simulation speed and high precision results, which can be verified the validity and correctness by the experimental results.
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