Levitation Stability Analysis of Micromachined Gyroscope with Electromagnetically Levitated Rotor

WU Xiao-sheng,CHEN Wen-yuan,ZHANG Wei-ping,HUANG Xiao-gang,LIU Wu,CUI Feng
DOI: https://doi.org/10.3969/j.issn.1004-1699.2008.01.012
2008-01-01
Abstract:Micromachined gyroscope with electromagnetically levitated rotor (MGELR) is a new kind of an-gular rate sensor, which has the same working mechanism as traditional mechanical gyroscope. MGELR is hopeful to obtain micromachined gyroscope with high precision. The stable levitation is important for MGELR. The paper gives a comprehensive analysis on stability of levitated rotor. The influence of coils,diameter of rotor, current amplitude and levitating height on levitation stability is detailed in the paper.The edge effect is proposed for explaining the lateral force induced by eccentricity of micro-rotor. The re-suits of experiment confirm the analysis. At last, the condition of stable levitation is concluded. The work of paper provides theory foundation for the structure design of MGELR.
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