Abstract:Multiplefield coupling is a typical characteristic of most mechanical structures in microelectromechanical system (MEMS), that involves the effects due to mechanical, electrostatic, magnetic, thermal actions, etc. Dynamic behaviors of the microstructures in those fields are of importance to estimate the design and manufacturing of the microsystem. In this paper, electromechanical analyses of some microstructures are presented based on a combination of boundary element method (BEM) and finite element method (FEM), to show the hybrid numerical technique not only useful to analyze the flexible deformation of the structures under electrostatic forces, but also important to evaluate the parameter variations of the electronic fields as the movement of the mechanical structures in those structronic systems. The simulation procedure is verified by both analytical solutions of some examples and experimental results of some microstructures driven by electrostatic field, in which the mechanical parameters such as the divergence of the deflection solution is related to the electrical characteristic such as the critical voltages of the electrostatic forces. Based on the structures involved in a laterally vibratory polysilicon gyroscope fabricated in our institute, the control equations of microgyroscope dynamics are presented, from that the response simulations of the microgyro are performed with the changes of the characteristic parameters, such as resonant frequency, quality factors, frequency disturbance, etc. Those results are useful for the optimal design of the structronic systems and the quality evaluation of the microprocessing, which are related to the rate measurement sensitivity and the output stability of the microsystem.

Modeling and simulation of levitation control for a micromachined electrostatically suspended gyroscope

Research of close loop control model for electrostatically levitated micro-gyroscope

Modeling of a Six-Degree-of-freedom Magnetic Levitation Platform Actuated by Noncontact Lorentz Forces

Modeling and Simulation of Micromachined Gyroscope

Stiffness Analysis And Levitation Force Control Of Active Magnetic Bearing For A Partially-Self-Bearing Flywheel System

Modeling of an electrostatic micromotor based on a levitated rotor

Decoupling Control of Micromachined Spinning-Rotor Gyroscope with Electrostatic Suspension

Design and Fabrication of an Electrostatically Suspended Micromachined Gyroscope

Micromachined Rotational Gyroscopes with an Electrostatically Levitated Rotor

Design and Simulation of an Active Electrostatic Bearing for MEMS Micromotors

Micromachined Electrostatically Suspended Gyroscope with A Spinning Ring-Shaped Rotor

Modelling and Stability Analysis for a Magnetically Levitated Slice Motor (MLSM) with Gyroscopic Effect and Non-Collocated Structure Based on the Extended Inverse Nyquist Stability Criterion

GRU-ESO Strategy for a Distributed Coil Magnetically Levitated Planar Micromotor

System Modelling of A Vibratory Micromachined Gyroscope with Bar Structure

Vibration Control for Active Magnetic Bearing High-Speed Flywheel Rotor System with Modal Separation and Velocity Estimation Strategy

Design of rebalance loop for an electrostatically suspended micromachined gyroscope

Position Estimation Accuracy Improvement Based on Accurate Modeling of Self-Sensing Active Magnetic Bearings

Analysis and Compensation of Bias Drift for a Micromachined Spinning-rotor Gyroscope with Electrostatic Suspension.

Modeling and Analysis of A Micromotor with an Electrostatically Levitated Rotor

Electromechanical Analysis of Microelectromechanical Structures and Dynamic Simulations of Laterally Vibratory Microgyroscope

Self-Locking Avoidance and Stiffness Compensation of a Three-Axis Micromachined Electrostatically Suspended Accelerometer