Micro-Structure Thermal Scanning and Imaging System Based on Femto-Second Laser Pump and Probe Thermoreflectance Method

祝捷,唐大伟
2013-01-01
Kung Cheng Je Wu Li Hsueh Pao/Journal of Engineering Thermophysics
Abstract:A thermal scanning and imaging system with micro-scale space resolution has been established on the basis of two-color femto-second laser pump and probe thermoreflectance method. Materials with micro-scale structures could be scanned on the top surface with a space resolution of 6 μm, and the 1-direction thermoreflectance signals could be collected. We obtained the micro-thermal-image of a sample made by copper and tin with micro-structure to testify this imaging method, and the results showed that it could realize the thermal scanning and imaging with a 6 μm resolution, but the signals were not good enough for fitting to get the thermal conductivity map due to rough surface condition of the sample. Therefore, a relatively smoother surface is required for thermal imaging with the method discussed in this paper.
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