Abstract:We review recent advances in experimental methods for high spatial-resolution and high time-resolution thermometry, and the application of these and related methods for measurements of thermal transport in low-dimensional structures. Scanning thermal microscopy (SThM) achieves lateral resolutions of 50 nm and a measurement bandwidth of 100 kHz; SThM has been used to characterize differences in energy dissipation in single-wall and multi-wall carbon nanotubes. Picosecond thermoreflectance enables ultrahigh time-resolution in thermal diffusion experiments and characterization of heat flow across interfaces between materials; the thermal conductance G of interfaces between dissimilar materials spans a relatively small range, 20 <G <200 MW m(-2) K-1 near room temperature. Scanning thermoreflectance microscopy provides nanosecond time resolution and submicron lateral resolution needed for studies of heat transfer in microelectronic, opto-electronic and micromechanical systems. A fully-micromachined solid immersion lens has been demonstrated and achieves thermal-radiation imaging with lateral resolution at far below the diffraction limit, <2 mum. Microfabricated metal bridges using electrical resistance thermometry and joule heating give precise data for thermal conductivity of single crystal films, multilayer thin films, epitaxial superlattices, polycrystalline films, and interlayer dielectrics. The room temperature thermal conductivity of single crystal films of Si is strongly reduced for layer thickness below 100 nm. The through-thickness thermal conductivity of Si-Ge and GaAs-AlAs superlattices has recently been shown to be smaller than the conductivity of the corresponding alloy. The 3omega method has been recently extended to measurements of anisotropic conduction in polyimide and superlattices. Data for carbon nanotubes measured using micromachined and suspended heaters and thermometers indicate a conductivity near room temperature greater than diamond.

Sub-Microscale Temperature Distributions Measured by Scanning Thermal Microscopy\+*

Thermometry and Thermal Transport in Micro/Nanoscale Solid-State Devices and Structures

Realizing the Accurate Measurements of Thermal Conductivity over a Wide Range by Scanning Thermal Microscopy Combined with Quantitative Prediction of Thermal Contact Resistance.

DISCUSSION ON THERMAL CONDUCTIVITY MEA- SUREMENTS ON A MICRO-SCALE USING SCANNING THERMAL MICROSCOPE

Thermomechanical Modeling of Scanning Joule Expansion Microscopy Imaging of Single-Walled Carbon Nanotube Devices

Quantitative Thermal Imaging of Single-Walled Carbon Nanotube Devices by Scanning Joule Expansion Microscopy.

A Comprehensive Review for Micro/Nanoscale Thermal Mapping Technology Based on Scanning Thermal Microscopy

Nanoscale spatial resolution probes for Scanning Thermal Microscopy of solid state materials

Thermal Visualization of Buried Interfaces by Transient and Steady-State Responses of Time-Domain Thermoreflectance

Thermal conductivity measurements of thin films by non-contact scanning thermal microscopy under ambient conditions

Realizing the nanoscale quantitative thermal mapping of scanning thermal microscopy by resilient tip-surface contact resistance models.

Thermal Visualization of Buried Interfaces Enabled by Ratio Signal and Steady-State Heating of Time-Domain Thermoreflectance

Scanning thermal microscopy studies of local temperature distribution of micron-sized metallization lines

Scanning Thermal Probing of Interfacial Thermal Conductivity of Metal Matrix Composites

Near-field radiation analysis and thermal contact radius determination in the thermal conductivity measurement based on SThM open-loop system

A Review on Principles and Applications of Scanning Thermal Microscopy (SThM)

Scanning thermal microscopy and its applications for quantitative thermal measurements

Micro-Structure Thermal Scanning and Imaging System Based on Femto-Second Laser Pump and Probe Thermoreflectance Method

Transformer bridge-based metrological unit for scanning thermal microscopy with resistive nanoprobes

Developments on Thermometric Techniques in Probing Micro- and Nano-heat

Nanoscale thermometry under ambient conditions via scanning thermal microscopy with 3D scanning differential method.