A Potentiometric So2 Gas Sensor Based On The Li3po4-Li2sio3 Solid Electrolyte Thin Film
Kedong Chen,Mi Zhang,Hairong Wang,Hanqing Gu
DOI: https://doi.org/10.1063/1.5080474
IF: 1.6
2019-01-01
Review of Scientific Instruments
Abstract:A potentiometric sulfur dioxide (SO2) gas sensor based on the Li3PO4-Li2SiO3 solid electrolyte thin film was developed. The sensor was based on a galvanic cell O-2, SO2, Au, Li2SO4-V2O5|Li3PO4-Li2SiO3|Au, SO2, O-2. The Li3PO4-Li2SiO3 thin film was deposited on the Al2O3 substrate by RF magnetron sputtering, and the Au patterns were fabricated as the electrodes. The sensing electrode materials of Li2SO4-V2O5 with different dopants TiO2 and MgO were prepared, and as the ratio of Li2SO4:TiO2 is 1:1 (mol) with 5 wt. % V2O5 and 5 wt. % MgO, the sensor showed relatively good response characteristics to SO2 at 450 degrees C. Then, the sensor was further tested at the working temperature from 400 degrees C to 500 degrees C. The results show that the sensor has good response to SO2 at 400-450 degrees C, and the sensitivity is 90.15-57.19 mV/dec. The response and recovery times are 20-40 s and 2.5-4 min, respectively, when the gas concentration of SO2 increases from 10 ppm to 100 ppm and then decreases to 10 ppm. At 425 degrees C, the sensitivity is close to the theoretical values, and the final recovery potential of the sensor is almost consistent with the initial potential.