Abstract:A solid potentiometric CO 2 sensor has been developed using Li 3 PO 4 as the electrolyte, Li 2 TiO 3 /TiO 2 as the reference electrode, and Li 2 CO 3 as the sensing electrode. The Li 3 PO 4 film was deposited on Al 2 O 3 substrate by resistance heating evaporation. Two Pt electrodes with designed patterns were formed on the electrolyte film by micro fabrication technologies. The reference electrode and the sensing electrode were prepared by thick-film technology to cover part of the two Pt electrodes. Various properties were tested: sensitivity under different conditions, response and recovery properties, cross-interference performance, and stability. The values of ΔEMF/dec are 22 mV/dec, 45 mV/dec, and 78 mV/dec in accordance with the operating temperatures: 300°C, 400°C, and 500°C. At 500°C, the response time and recovery time are 30 s and 40 s, respectively, which is better than those of 400°C. When the thickness of Li 3 PO 4 film is greater than 650 nm, the EMF output of the sensor changes little with change of the film thickness. From the results, it can be concluded that the optimal working temperature for the sensor is 500°C, and the optimal thickness of Li 3 PO 4 is about 650 nm.

Micro CO<sub>2</sub> Sensor Based on Li<sub>2</sub>CO<sub>3</sub>, Pt | Li<sub>3</sub>PO<sub>4</sub> | Pt, Li<sub>2</sub>TiO<sub>3</sub>-TiO<sub>2</sub> Structure

Micro CO 2 sensor based on Li 2CO 3, Pt | Li 3PO 4 | Pt, Li 2TiO 3-TiO 2 structure

Au Thin-Film Electrodes Based Potentiometric CO 2 Sensor Using Li 3 PO 4 As Both the Reference Material and the Solid Electrolyte

Response Characteristics of A Potentiometric Co2 Gas Sensor Based on Li3po4 Solid Electrolyte Using Au Film As the Electrodes

Solid potentiometric CO 2 sensor using Li 3PO 4 film as the electrolyte

Solid Potentiometric ${\rm CO}_{2}$ Sensor Using ${\rm Li}_{3}{\rm PO}_{4}$ Film as the Electrolyte

Improved Sensing Properties of CO2Gas Sensor Based on Li3PO4-Li2SiO3Thin Film Compared with Li3PO4

Potentiometric Co2 Sensor with Au,Li2co3/Li+-Electrolyte/Limn2o4 Structure

Solid-state Potentiometric CO 2 Sensor Combining Li 3 PO 4 with MoO 3 -Doped Li 2 CO 3 Sensing Electrode

Electrochemical Sensor for Dissolved Carbon Dioxide Measurement

MEMS based metal oxide semiconductor carbon dioxide gas sensor

A new carbon dioxide gas sensor based on solid bielectrolyte

Polyethyleneimine/polyethylene-glycol/Ti3C2Tx composites for ultrasensitive room-temperature CO2 sensing

Fabrication of thin film potentiometric CO2 sensors on differentiate substrate surfaces and their characteristics

A CO2 gas sensor based upon composite Nasicon/Sr–β–Al2O3 bielectrolyte

A micro oxygen sensor based on a nano sol-gel TiO2 thin film.

A Potentiometric So2 Gas Sensor Based On The Li3po4-Li2sio3 Solid Electrolyte Thin Film

Miniaturized Amperometric Solid Electrolyte Carbon Dioxide Sensors

High Performance Solid Electrolyte-Based NO2 Sensor Based on Co3V2O8 Derived from Metal-Organic Framework

Ionic Liquid-Packed Microfluidic Device with Non-Planar Microelectrode as a Miniaturized Electrochemical Gas Sensor

Design And Fabrication Of An Integrated Mems O-2 Sensor Based On Nanostructured Tio2

Micro CO&lt;sub&gt;2&lt;/sub&gt; Sensor Based on Li&lt;sub&gt;2&lt;/sub&gt;CO&lt;sub&gt;3&lt;/sub&gt;, Pt | Li&lt;sub&gt;3&lt;/sub&gt;PO&lt;sub&gt;4&lt;/sub&gt; | Pt, Li&lt;sub&gt;2&lt;/sub&gt;TiO&lt;sub&gt;3&lt;/sub&gt;-TiO&lt;sub&gt;2&lt;/sub&gt; Structure