Laser Beam Pointing Control Based on Differential Dual-View Imaging
Yang Hongwei,Du Yimian,Lu Lidong,Tao Wei,Lu Junguo,Zhao Hui
DOI: https://doi.org/10.3788/cjl202148.1705002
2021-01-01
Abstract:Objective As a displacement measurement tool, laser triangulation displacement sensors (LTDS) are widely used in industrial detection because of their noncontact nature and high accuracy. The optical path of LTDS is illustrated as follows: a collimated laser beam is projected onto the detected object and the diffuse reflected light is focused by a receiver lens onto a charge-coupled device (CCD) detector. When the detected object is moved along the direction perpendicular to the optical axis of the source laser beam, the reflected light beam spot (image spot) focused on the CCD will move correspondingly. Thus, the displacement over which the detected object moves can be calculated using a geometric optical model that is related to the image spot displacement. Laser-beam dithering is considered one of the major error sources in laser applications. To solve this problem, many averaging methods have been proposed. However, methods that can image two image spots on one CCD with a single image system are ineffective at improving the error factor of the laser beam directional instability. In other methods, structures comprising prisms or reflectors for producing two differential optical paths have been proposed. With those methods, the positional average of two image spots remains constant irrespective of the angle by which the source laser beam dithers. However, an installation error might be introduced, for which calibration is not possible because it is related to the laser dithering angle. Methods In this paper, a laser beam pointing control-based dual-view for laser triangulation displacement sensors (DVLTDS) is proposed. The structure comprises a collimated laser, two receiver lenses, and two CCDs, where the two receiver lenses and two CCDs are symmetrically arranged around to the optical axis of the source laser beam. DVLTDS generates two beam intensity distributions (BIDS) on two CCDs simultaneously. It converts the centroid movement of each BID into the detected object displacements through averaging. Hence, if the relationship among the optical parameters such as object distance, image distance, view angle, image angle, working distance, and the dithering angle satisfies certain constraint conditions (Eq. 6), then at the angle at which the source laser beam dithers, the average positions of the two laser spots imaged on the two detectors are equal within the permissible error range. Results and Discussions For validating DVLTDS, an experimental setup was built and various tests, including calibration, repeatability, and nonlinearity, were conducted. To satisfy the constraint condition, the optical parameters, including the focus of the receiver lens, working distance, object distance, image distance, view angle, and image angle, were designed in Zemax software in the nonsequential mode (Fig. 2). The experimental platform of DVLTDS was built according to the design data (Table 1, Fig. 3). DVLTDS was calibrated with a dual-frequency laser interferometer (RENISHAW XL-80)with a linear resolution of 1 nm. The relative positions of DVLTDS were calibrated. The target object (a ceramic block) was driven point-by-point along the optical axis of the source laser beam using a stepper motor with an increment of 0.1 mm within 10 mm. At each point, the collimated red laser was rotated with an increment of 0.1 degrees within +/- 0.4 degrees. Results show that the calibration curve of DVLTDS was coincident with that of the laser interferometer. Moreover, the standard deviation (STD) was found to be 0.2532 mu m with DVLTDS [Fig. 5(a)]. In comparison, the STD was found to be 28.53 mu m with LTDS [Fig. 5(b)]. In repeatability tests, the ceramic block was fixed at a closer point, zero point, and a farther point. The collimated red laser was rotated within +/- 0.4 degrees with an increment of 0.1 degrees. Using DVLTDS, the repeatability accuracy was within +/- 5 mu m and the STD was within 0.0035 mm. In comparison, with LTDS, the repeatability accuracy was +/- 1.4 mm and the STD was more than 0.5 mm (Table 3). The nonlinearity is expressed as the ratio of lr to (xt-xr), where xt is the tested value of DVLTDS, xr is the tested value of the XL-80 interferometer, and lr is the tested range. In this experiment, measurements were performed by moving objects from a closer point to a farther point with an increment of 0.1 mm for three runs. The results reveal that the nonlinearity of DVLTDS is within +/- 0.04% full scale (F.S.) [Fig. 7(a)]. In comparison, the nonlinearity without differential dual view is within +/- 0.8% F.S. [Fig. 7(b)]. Conclusions In conclusion, experimental results indicate that with DVLTDS, the estimated STD of the fitting error decreases from 28.53 to 0.2532 mu m, the repeatability accuracy can be reduced from +/- 1.4 to +/- 5 mu m, and the nonlinear error can be reduced from +/- 0.8% F.S. to +/- 0.04% F.S. These results verify that laser beam pointing control-based dual-view for laser displacement sensors can suppress the effects of laser beam dithering.