Experimental Research on Anti-Vibration Interferometry Based on Time-Frequency-domain Analysis

Yao Hu,Qun Hao,Fanghua Zhang,Yuhan Tian
DOI: https://doi.org/10.1117/12.2035878
2013-01-01
Abstract:Phase-shifting interferometry is a non-contact precision precise measuring method for optical surface, but it is highly sensitive to external vibrations. A time-and-frequency-domain (TFD) anti-noise phase-shifting interferometry is proposed to eliminate the effect of vibrations and improve the precision of measurement. According to simulations and preliminary experiments, active phase-shifting speed as well as interferogram capture speed should be increased to improve the anti-vibration capability of the TFD method. In this paper, a fast phase-shifting approach based on PZT actuator and interferogram detection with high-speed camera is proposed. Preliminary experimental results are given to demonstrate the approach.
What problem does this paper attempt to address?