Abstract:This paper proposed a novel absolute displacement measurement technology which is based on the wavenumber spectrum of low coherence interferometry. The signal from a Michelson interferometer, which is derived from a broadband light source, is dispersed by a bulk dispersing grating. The interferometric signal of each wavelength is detected by a linear array charge coupled device (CCD). By transforming the wavelength spectrum of the signal into wavenumber spectrum, absolute displacement can be measured precisely by measuring the wavenumber difference between two neighboring peaks of the wavenumber spectrum. Unlike the normal low coherence interferometric measurement systems (LCIMS) which have to scan the optical path difference (OPD) of the interferometer in order to demodulate the measurand, there is no need of scanning action during the measurement procedure, which not only simplifies the measurement system but also improves the measurement speed greatly. A fiber Bragg grating (FBG) is employed to produce a feedback signal which is used to stabilize the Michelson interferometer so as to obtain high measurement precision. A step height with the calibrated value of 50μm that is configurated with two gauge blocks is measured by the system. The measurement resolution is 6.03nm and the standard deviation of 10 times measurement results is 6.8nm.

Vibration-Displacement Measurement Employing Phase Tracking Technique with an Optical Fiber Michelson Interferometer

Vibration Compensating Beam Scanning Interferometer for Surface Measurement

A High-Resolution Displacement Sensor Based on a Grating Interferometer with the Phase Modulation Technique

Modified Homodyne Laser Interferometer Based on Phase Modulation for Simultaneously Measuring Displacement and Angle.

Nanometer-scale Displacement Sensor Based on Phase-Sensitive Diffraction Grating.

Multimode-interference-effect-based all-fiber displacement sensing system for an orthopedic Ilizarov apparatus device.

Nanometer-Scale Vibration Measurement Using an Optical Quadrature Interferometer Based on 3 × 3 Fiber-Optic Coupler

Sensitivity improvement of submicron dynamic displacement measurement system composed of phase-modulated fiber optic interferometer

Distributed Single Fiber Optic Vibration Sensing with High Frequency Response and Multi-Points Accurate Location

Micro-vibration measuring technology based on heterodyne interference

Optical Inertial Vibration Sensor System Using Grating Technology

An Optical Fiber Heterodyne Interferometry Displacement Sensor.

All-fiber heterodyne velocity and displacement interferometer based on DPLL Doppler tracking with sub-nanometer per second and picometer sensitivity

A novel absolute displacement measurement technology based on wavenumber resolved low coherence interferometry

Optical Fiber Displacement Sensing System Based on Dual-Wavelength with Single-Wavelength Interferometry

High-stability and Large-Displacement Measurement System Based on Multiplexed Fiber Interferometry

A Novel Optical Fiber Displacement Measurement System

Subnanometer Absolute Displacement Measurement Using a Frequency Comb Referenced Dual Resonance Tracking Fabry-Perot Interferometer.

Ultrahigh-resolution Wavelength Scanning System with FBG Fabry-Perot Interferometer for Displacement Sensing

Large-Range and Highly Sensitive Displacement Measurement With an Optical Carrier-Based Microwave Interferometry

Experimental and theoretical study of displacement measurement based on frequency modulation optical feedback in a birefringence dual frequency laser