Abstract:Two-dimensional (2D) hexagonal boron nitride (h-BN), which has a similar honeycomb lattice structure to graphene, is promising as a dielectric material for a wide variety of potential applications based on 2D materials. Synthesis of high-quality, large-size and single-crystalline h-BN domains is of vital importance for fundamental research as well as practical applications. In this work, we report the growth of h-BN films on mechanically polished cobalt (Co) foils using plasma-assisted molecular beam epitaxy. Under appropriate growth conditions, the coverage of h-BN layers can be readily controlled by growth time. A large-area, multi-layer h-BN film with a thickness of 5~6 nm is confirmed by Raman spectroscopy, scanning electron microscopy, X-ray photoelectron spectroscopy and transmission electron microscopy. In addition, the size of h-BN single domains is 20~100 μm. Dielectric property of as-grown h-BN film is evaluated by characterization of Co(foil)/h-BN/Co(contact) capacitor devices. Breakdown electric field is in the range of 3.0~3.3 MV/cm, which indicates that the epitaxial h-BN film has good insulating characteristics. In addition, the effect of substrate morphology on h-BN growth is discussed regarding different domain density, lateral size, and thickness of the h-BN films grown on unpolished and polished Co foils.

Epitaxial growth of single-domain graphene on hexagonal boron nitride

Chemical Vapor Deposition Growth of Large-Scale Hexagonal Boron Nitride with Controllable Orientation

Direct growth of large-area graphene and boron nitride heterostructures by a co-segregation method

Synthesis of in-plane and stacked graphene/hexagonal boron nitride heterostructures by combining with ion beam sputtering deposition and chemical vapor deposition

Large scale growth and characterization of atomic hexagonal boron nitride layers.

Aligned Growth of Hexagonal Boron Nitride Monolayer on Germanium

Nucleation and Growth of Single Crystal Graphene on Hexagonal Boron Nitride

Atomic Layers of Hybridized Boron Nitride and Graphene Domains

Seed-Assisted Growth of Single-Crystalline Patterned Graphene Domains on Hexagonal Boron Nitride by Chemical Vapor Deposition.

Hexagonal Boron Nitride Growth on Cu-Si Alloy: Morphologies and Large Domains.

Direct Growth of Hexagonal Boron Nitride on Epitaxial Graphene

Water-assisted growth of large-sized single crystal hexagonal boron nitride grains

Increasing coverage of mono-layer graphene grown on hexagonal boron nitride

Wafer-scale CVD Growth of Monolayer Hexagonal Boron Nitride with Large Domain Size by Cu Foil Enclosure Approach

Graphene growth on h-BN by molecular beam epitaxy

Towards the growth of single-crystal boron nitride monolayer on Cu

Silane-catalysed fast growth of large single-crystalline graphene on hexagonal boron nitride

Large-area growth of multi-layer hexagonal boron nitride on polished cobalt foils by plasma-assisted molecular beam epitaxy

One-Pot Confined Epitaxial Growth of 2D Heterostructure Arrays

Silane-Catalyzed Fast Growth of Large Single-Crystalline Graphene on Hexagonal Boron Nitride

Edge Control of Graphene Domains Grown on Hexagonal Boron Nitride