Three Dimensional Micromachining on Aluminum Surface by Electrochemical Wet Stamping Technique

Li-Min Jiang,Yu-Jie Du,Jingchun Jia,Lei-Jie Lai,Hang Zhou,Li-Min Zhu,Zhao-Wu Tian,Zhong-Qun Tian,Dongping Zhan
DOI: https://doi.org/10.1016/j.elecom.2013.04.031
IF: 5.443
2013-01-01
Electrochemistry Communications
Abstract:We proposed an up–down working mode of electrochemical wet stamping technique (EC-WETS) for three dimensional (3D) micromachining on aluminum (Al) surface. 3D microstructures on a Si mold were transferred on to an agarose hydrogel containing 15% NaNO3, 2% MgF2, 1% NaOH and 5% glycerin, which acted as the quasi-solid electrolyte for the electrochemical micromachining. The transferred 3D microstructures on agarose hydrogel were then duplicated onto Al surface through anodic dissolution. The micromachining quality was improved by pulse-potential method dramatically with a machining tolerance lower than 200nm and an average removal rate of 210nmmin−1 in the Z direction. This method was proved to be a highly efficient, low cost and green method for 3D micromachining on active metal surface, which would be valuable for the manufacture of microelectromechanical system (MEMS).
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