Abstract:Nanopore sensing is a key technology for single-molecule detection and analysis. Solid-state nanopores have emerged as a versatile platform, since their fabrication allows to engineer their properties by controlling size, shape, and chemical functionalization. However, lithography-based fabrication approaches for non-planar nanopores-on-chip rely on polymers that have limits with respect to hard- and robustness, durability, and refractive index. In this respect, nanopores made of metal oxides with high dielectric constant would be much more favourable and have the potential to extend the suitability of solid-state nanopores towards optoelectronic technologies. Here, we present a versatile method to fabricate three-dimensional nanopores of different dielectric oxides with controlled shapes. Our approach uses photoresist only as a template in the focused-ion-beam lithography to define the nanopore shape, which is subsequently coated with different oxides (SiO2, Al2O3, TiO2 and HfO2) by atomic-layer deposition. Then the photoresist is fully removed by chemo-physical treatment, resulting in nanopores entirely made from dielectric oxides on a thin solid-state membrane. Our methodology allows straightforward fabrication of convex, straight, and concave nanopore shapes that can be employed in various technologies and applications. We explored their performance as ionic nanochannels and investigated the dependence of the ionic current rectification on the nanopore geometry. We found hysteresis in the ionic conductance that enables potential applications of the nanopores in memristors. We also investigated the dielectric oxide nanopores for DNA sensing by measuring both cis-trans and trans-cis translocations and support our data with numerical simulations based on the Poisson-Nernst-Planck model.

Shrinking of Silicon Nanopore Arrays by Direct Dry-Oxygen Oxidation

Controllable Shrinking of Inverted-Pyramid Silicon Nanopore Arrays by Dry-Oxygen Oxidation

Controllable Shrinking of Silicon Oxide Nanopores by High Temperature Annealing

SEM-induced Shrinkage and Site-Selective Modification of Single-Crystal Silicon Nanopores

Highly Efficient Shrinkage of Inverted-Pyramid Silicon Nanopores by Plasma-Enhanced Chemical Vapor Deposition Technology

Atomically thin molybdenum disulfide nanopores with high sensitivity for DNA translocation.

Controllable Shrinking Fabrication of Solid-State Nanopores

Shrinking solid-state nanopores using electron-beam-induced deposition

Photothermally Assisted Thinning of Silicon Nitride Membranes for Ultrathin Asymmetric Nanopores.

Nanopore arrays in a silicon membrane for parallel single-molecule detection: fabrication

Fabrication of Silicon Nanopore Arrays Using A Combination of Dry and Wet Etching

Controllable Shrinking and Shaping of Silicon Nitride Nanopores under Electron Irradiation

Size evolution and surface characterization of solid-state nanopores in different aqueous solutions.

Dwell Time Characterization of DNA Translocation Through ITO-SiNx Nanopores

A novel method to fabricate silicon nanopore arrays

Massive Fabrication of Silicon Nanopore Arrays with Tunable Shapes

Shrinking Graphene Nanopore Using Electron-Beam-Induced Deposition For Single Molecule Detection

Tailored Fabrication of 3D Nanopores with Dielectric Oxides for Multiple Nanoscale Applications

Self-Aligned Nanopore Formed on a SiO2 Pyramidal Membrane by a Multipulse Dielectric Breakdown Method

DNA-functionalized silicon nitride nanopores for sequence-specific recognition of DNA biosensor

Visualization of DNA Translocation and Clogging Using Photoluminescent-Free Silicon Nanopore Arrays