Metal-catalyst Free Integration of SiO2 Nanowires into Carbon MEMS

Liangliang Xu,Tielin Shi,Shuang Xi,Hu Long,Shiyuan Liu,Zirong Tang
DOI: https://doi.org/10.1109/nems.2013.6559833
2013-01-01
Abstract:This paper presents an innovative technique of integrating silica nanowires to photoresist-derived carbon microelectromechanical systems (C-MEMS) on silicon substrate. The silica nanowires were synthesized through thermal treatment in a tube furnace at 1200 °C under a gaseous environment of N2 and H2. The stiff morphology and radicalized distribution around carbon posts of nanowires was observed, which was different from much of the previous studies. High-temperature annealing and meticulous-controlled pyrolying atmosphere could be the causes of the formation of unusual SiO2/C-MEMS integrated structures.
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