Fabrication and characterization of vertically aligned carbon nanotubes on silicon substrates using porous alumina nanotemplates.

Wenchong Hu,Liming Yuan,Zhi Chen,Dawei Gong,Kozo Saito
DOI: https://doi.org/10.1166/jnn.2002.104
2002-01-01
Journal of Nanoscience and Nanotechnology
Abstract:An ethylene-air laminar diffusion flame successfully provided silicon substrates of anodic aluminum oxide (AAO) template with vertically oriented well-aligned carbon nanotubes. Field emission scanning electron microscopy (SEM) showed that open-tipped carbon nanotubes consisting of tube elements with the same length and diameter uniformly coated the template. High-resolution transmission electron microscopy (TEM) analyses revealed these nanotubes to be multiwalled carbon nanotubes, some well graphitized. It was found that cobalt catalyst particles, but not the porous aluminum templates, helped the growth of carbon nanotubes through graphitization and bonding of carbon nanotubes to the silicon substrates.
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