Abstract:This study presents a fabrication strategy for 3D carbon microstructures using via two-photon vat photopolymerization (2p-VPP) and susceptor-assisted microwave pyrolysis (SMWP). Fabricating carbon-based electrode materials with miniaturized functional structures is pivotal for developing high-performance electrochemical microdevices. However, efficiently producing these structures in the submicron regime with desired materials is still challenging. To address this, a hybrid microfabrication strategy was developed, and 3D carbon-based microstructures with submicron resolution were successfully produced. A carbon nanotube nanocomposite photoresist (SCNT-PR1) with improved dispersibility was first prepared. After a comprehensive printability assessment, 3D microstructures with a resolution of 833 ± 54 nm were produced using 2p-VPP. Through SMWP, the microstructures were transformed into pyrolytic carbon (PyC) nanocomposite microstructures with retained geometrical features. SMWP was shown to produce PyC with a less disordered carbon atomic structure, thanks to the accelerated pyrolysis reaction under MW irradiation, when compared to pyrolysis using a conventional furnace. The resistivity was reduced by over 75% from 0.69 ± 0.13 Ω cm to 0.16 ± 0.01 Ω cm, and enhanced electrochemical performance was confirmed. The fabricated PyC nanocomposite showed a further 12% reduction in electrical resistivity and a 20% lower charge transfer resistance for the redox reaction when using SCNT-PR1 as the precursor. Overall, this hybrid fabrication strategy demonstrates the advantages of producing 3D carbon microstructures with precise control over the geometric features and enhancing electrical and electrochemical properties compared to the conventional pyrolysis method. Its potential could be extended to the fabrication of miniaturized electrochemical devices, including microelectronics and point-of-care devices.

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