Abstract:<p>An experimental study is conducted to investigate the multi-length scale evolution from micro/nano-structural arrays to V-grooves by femtosecond laser-irradiations, considering the effects of laser polarization and the number of scans on the periodic features and the micro/nano-structures. It is found that the evolution from micro/nano-structural arrays to V-grooves is gradual as the laser fluence, scan speed or the number of scans is increased. Laser-induced surface instability, hatching effects, Coulomb explosions, melting, and evaporation are found to be the underlying mechanisms for the micro/nano structural formation. As the laser fluence increases, the agglomerated nanoparticles change from sparse to dense, so that the boundary between the LIPSS (laser-induced periodic surface structures) becomes less obvious. The oxygen (O) elements attached to the surface of nanoparticles increase with an increase in laser fluence. A high-spatial-frequency LIPSS (HSFL) can transform to low-spatial-frequency LIPSS (LSFL) as the laser fluence excesses the ablation threshold, while the spatial period of the HSFL and LSFL is independent of fluence. It is shown that the irradiated surface evolves from a near-damage-free zone to one with a recast layer and thermal-induced micro-cracks, defined as heat-affected zones (HAZ). Near thermal damage-free micro/nano-structural arrays with different orientations on the sidewalls of the grooves are fabricated at close to the laser ablation threshold by multi-pass scanning. A self-organizing model is developed which shows that laser polarization leads to the asymmetry of energy distribution and the structural array is arranged along the main direction of energy flow. The model analysis shows a good agreement with experimental results and provides an efficient means to understand the interaction between femtosecond laser and silicon carbide (SiC).</p>

Silicon wafer modification by laser interference

Modifying single-crystal silicon and trimming silicon microring devices by femtosecond laser irradiation

Formation of Array Microstructures on Silicon by Multibeam Interfered Femtosecond Laser Pulses

Study for Laser Controlled Fabrication of Micro/Nano-Structures of Silicon Based on Multi-Physics Model

Post-Processing Trimming of Silicon Photonic Devices Using Femtosecond Laser.

Femtosecond laser modification of silicon carbide substrates and its influence on CMP process

One-Step femtosecond laser irradiation of Single-Crystal Silicon: Evolution of Micro-Nano structures and damage investigation

Evolution of Microstructures on Silicon Induced by Femtosecond Laser with Multiple Pulses

Femtosecond laser two-beam interference applied to 4H-SiC surface hierarchical micro-nano structure fabrication

Combined Continuum-Atomistic Modeling of Ultrashort-Pulsed Laser Irradiation of Silicon

Coalescence and dislocation of laser induced periodic ripples on silicon by double time delayed femtosecond laser beams

Fabrication of High Refractive Index-Modulation Structures in Fused Silica by Femtosecond Laser Pulses

Sub-wavelength Ripple Formation on Silicon Induced by Femtosecond Laser Radiation

Experimental Study on Femtosecond Laser Processing Performance of Single-Crystal Silicon Carbide

Effects of Parameters in Femtosecond Laser Micromachining on Ablation of Silicon

Direct observation and quantification of nanosecond laser induced amorphization inside silicon

Evolution of micro/nano-structural arrays on crystalline silicon carbide by femtosecond laser ablation

Single-crystal silicon ablation with temporally delayed femtosecond laser double-pulse trains

Numerical Simulation and Experimental Investigation of ps Pulsed Laser Modification inside 4H-SiC Material

Fabrication of highly homogeneous and controllable nanogratings on silicon via chemical etching-assisted femtosecond laser modification

Laser Grinding of Single-Crystal Silicon Wafer for Surface Finishing and Electrical Properties