Analysis of Electromechanical Interface Model for Liquid Floated Micro-Gyroscope

Mingyuan Ren,Xiaowei Liu,Wen Zuo,Zhigang Mao
DOI: https://doi.org/10.1109/nems.2013.6559846
2013-01-01
Abstract:This paper presents an electromechancial interface model of liquid floated micro-gyroscope, which can analyze sensing capacitors and resistance of gyroscope. The impacts of them are analyzed and simulated with the simulation software of circuit. The analytic results indicate that the reasonable interface circuit can substantially remove the impacts of these parasitic capacitances, increase the signal noise ratio. To ensure the high resolution, the model of liquid floated micro-gyroscope with ANSOFT conducted. The results show the transfer characteristics of the sensor and nonlinear error of transfer characteristics.
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