Abstract:This paper carries out an experiment study of decoupling performance for a novel lateral axis micromachined gyroscope with varying environmental parameters. The non-ideal mathematical model for the coupling mechanism of the gyroscope is established through the gyro dynamic response matrix. The coupling components varying with ambient pressure and temperature induced by stiffness coupling, damping coupling and electrostatic force coupling are semi-analytically discussed. The overall coupling ratio is evaluated via experiments in the custom-built installation. The testing results show that the decoupling performance of the gyroscope is sensitive to the environmental parameters and all the non-ideal errors are determined as a function of ambient pressure and temperature. The coupling error varies from 0.05% to 0.25% within the pressure range of 100 Pa-100 kPa. The characteristics of coupling with temperature are measured from 20°C to 100°C with a variation from 0.35% to 0.41%. The results also indicate that within the range of measured ambient pressure and temperature, the minimum coupling ratio occurs at 100 Pa and room temperature. The overall performance of the gyroscope is tested under the pressure of about 2000 Pa and room temperature to achieve a relatively low coupling ratio. The scale factor is measured to be 7.8 mV (°) −1 s −1 with nonlinearity about 0.45% in the full-scale range of 600 (°) s −1 . The short-term bias stability is approximately 0.06 (°) s −1 (1 σ ) for 20 min with noise equivalent angular rate evaluated to be 0.077 (°) s −1 Hz −1/2 .

Modeling and Analysis of Coriolis Offset for Micromachined Gyroscope with Electrostatic Driving and Capacitive Sensing

Modeling and Simulation of Micromachined Gyroscope

Electrical Model of Inside Sense Outside Drive Frame Micro-Gyroscope Including Quadrature Error and Coriolis Offset

Effects of Structural Dimension Variation on the Vibration of MEMS Ring-Based Gyroscopes

An Electrostatically-driven Capacitively-sensed Frame Microgyroscope Fabricated with an Improved Process Flow

Error Modeling and Filtering Method for MEMS Gyroscope

System Modelling of A Vibratory Micromachined Gyroscope with Bar Structure

Simulation of characteristic of comb-gimbal micromachined gyroscope

A Decoupled Microelectromechanical Resonant Gyroscope

Analysis of Electromechanical Interface Model for Liquid Floated Micro-Gyroscope

Macro Model Extraction and Analysis of Electrostatically Suspended Micro-gyroscope

An experimental investigation on decoupling performance for a lateral axis micromachined gyroscope with varying environmental parameters

System-level Simulation of a Micromachined Electrostatically Suspended Gyroscope.

A Novel Microelectromechanical Resonant Gyroscope

Design of a Novel Micromachined Gyroscope with Compensatory Capacitance

Modeling and simulation of levitation control for a micromachined electrostatically suspended gyroscope

Decoupling Control of Micromachined Spinning-Rotor Gyroscope with Electrostatic Suspension

One Mechanically Decoupled Z-axis Gyroscope

Design And Simulation Of A Completely Decoupled Micromechanical Gyroscope

Research of close loop control model for electrostatically levitated micro-gyroscope

Research on Temperature Compensation Technology of Micro-Electro-Mechanical Systems Gyroscope in Strap-Down Inertial Measurement Unit