Interferometric Measurement of Freeform Surfaces Using Irregular Subaperture Stitching
Zhongming Zang,Jian Bai,Dong Liu,Yuling Liu,Yuhao Zhou,Tu Shi,Lei Zhang,Liang Miao,Wei Huang
DOI: https://doi.org/10.1088/1361-6501/ab3be3
IF: 2.398
2020-01-01
Measurement Science and Technology
Abstract:Irregular subaperture stitching interferometry (ISSI) is proposed for non-null optical freeform surface testing. Compared with circular and annular subapertures, irregular subapertures have a better performance in matching the locally resolvable interferograms due to the rotational asymmetry of freeform surfaces. A modified multi-aperture simultaneous reverse optimization reconstruction algorithm is employed for the subaperture stitching, allowing not only non-complementary subapertures but also no subaperture overlaps. Numerical simulations with error analyses display the accuracy of our method. Experiments showing the effectiveness of the ISSI are presented by testing a phi 20 mm biconic surface with cross-validation.