High-precision Spherical Subaperture Stitching Interferometry Based on Digital Holography
Bin Dong,Wen Xiao,Feng Pan,Leiping Che
DOI: https://doi.org/10.1016/j.optlaseng.2018.05.018
IF: 5.666
2018-01-01
Optics and Lasers in Engineering
Abstract:A novel subaperture stitching interferometry is proposed to measure the high-numerical-aperture sphericity for workshop testing, which combined digital holographic technology, subaperture stitching algorithm and systemic aberration calibration. Each subaperture is fleetly measured by the digital off-axis holography with a single shot so that the influence of measurement environment can be effectively reduced. The high-precision full aperture shape is obtained by stitching these subapertures, meanwhile, the subaperture alignment errors and the systemic aberration can be correctly compensated by the method of least-squares with the Zernike polynomial fitting. The approach is verified by testing three spherical surfaces, including a concave sphere, a convex sphere, and a hemisphere, in general environment. Moreover, the measurement results are compared with full aperture results by using a large aperture interferometer of Zygo and stitching result by using a subaperture stitching interferometer of QED. The results based on the proposed approach are consistent with the commercial interferometers. Specifically, the relative deviations of RMS are 0.009 lambda and 0.02 lambda for testing a concave and a convex spheres, and that is 0.011 lambda for testing a hemisphere. Our method not only has the comparable measurement accuracy with the commercial interferometers but also is more robust, feasibility and inexpensive than other subaperture stitching interferometry. We provide an anti-interference way to test spherical surfaces in workshop environment.