Effect of laser fluence on sacrificial layer morphology in laser rear-side ablation of film

Wenjun Wang,Bing Hu,Xuesong Mei,Bin Liu,Zibao Wang

DOI: https://doi.org/10.1364/ltst.2012.mf2c.4

2012-01-01

Abstract:In this paper, laser rear-side ablation of metallic films with the sacrificial layer is proposed. The effect of laser fluence on the sacrificial layer-polymer is investigated. Micro-lens arrays are fabricated on the polymer surface. © 2012 OSA.

What problem does this paper attempt to address?

High-precision fabrication of Pd film by laser rear-side ablation with thick sacrificial layer

Wenjun Wang,Kedian Wang,Gedong Jiang,Xuesong Mei,Chao Yang

DOI: https://doi.org/10.1177/0954405411400821

2011-01-01

Abstract:Thermal damage can be a major problem in laser machining thin films. This paper proposes a laser rear-side ablation technique that incorporates a sacrificial layer to absorb excess energy, thereby lessening the level of thermal damage created in the laser processing of metallic films. The sacrificial layer is placed between the quartz substrate and the metallic film. Experiments were performed on the laser machining of holes in a palladium film using phenol formaldehyde resin as the sacrificial layer in which the pulse energy and sacrificial layer thickness were varied. The experimental results validate the proposed approach in that the judicious choice of the values of the pulse energy and the thickness of the sacrificial layer lead to the creation of high-quality holes that do not display the effects of thermal damage. Thus, the proposed technique can be considered to be a promising method for the laser machining of metal films.
Effect of film properties on the material removing characteristics in femtosecond laser rear-side ablation of chromium film

Wenjun Wang,Xuesong Mei,Gedong Jiang,Kedian Wang,Chengjuan Yang

DOI: https://doi.org/10.1016/j.optlastec.2011.06.011

IF: 4.939

2012-01-01

Optics & Laser Technology

Abstract:The microfabrication of films with femtosecond lasers has been researched widely for its high spatial resolution and sub-spot-size features. Compared with the common front-side ablation, femtosecond laser rear-side ablation mechanism of films is more complex due to the possible film breaking process. In this paper, the effect of film properties such as adhesion strength and cohesion strength on the material removing characteristics in femtosecond laser rear-side ablation of Cr film is investigated. The possible film breaking process in the rear-side ablation is analyzed firstly, and then some experiments with different films, the vapor deposited Cr film, the sputtered Cr film and the Cr film of photomask are performed. The experimental results indicate that the film properties are key factors influencing material removal characteristics for laser rear-side ablation. By varying film properties and laser fluence, femtosecond laser rear-side ablation technique can be applied in laser cleaning process and fabrication of nanostructures. The unique feature of rear-side ablation will widen the application of femtosecond laser micromachining technique.
Damage mechanism and morphology characteristics of chromium film in femtosecond laser rear-side ablation

Wenjun Wang,Gedong Jiang,Xuesong Mei,Kedian Wang,Jinyou Shao,Chengjuan Yang

DOI: https://doi.org/10.1016/j.apsusc.2009.12.164

IF: 6.7

2010-01-01

Applied Surface Science

Abstract:In this paper, damage mechanism and morphology characteristics of chromium film in femtosecond laser rear-side ablation are investigated. The film removing process includes two key sub-processes: the laser ablation dynamic process and subsequent breaking and ejecting dynamic process. Film morphology in rear-side ablation is determined by the interrelation between the laser energy and the film strength. When lower laser energy is used, residual out-layer film is relative thick and tends to break into some large fragments, which results in an irregular ablation shape. While when higher pulse energy is used, thinner residual film with weaker break strength breaks into small fragments, the ablation quality improves correspondingly. Besides laser energy and film property, energy distribution of laser beam also affects the ablation quality. In experiments, this kind of effect is researched by changing the focal position. It is found that ripples, which are familiar nano-structures in front-side ablation, also exist in rear-side ablation. These ripples are formed initially at the interface between quartz substrate and film, and their coverage varies with the energy distribution. Additionally, increasing number of scans is an effective method to shorten the period of ripples.
A Low Diffraction Laser Beam As Applied to Polymer Ablation

XH Lu,YL Yao,K Chen

DOI: https://doi.org/10.2351/1.1405852

IF: 2.1

2001-01-01

Journal of Laser Applications

Abstract:A low diffraction beam is obtained by altering the existing resonator of a CO2 laser using a special phase plate. The phase plate is designed based on the boundary diffraction principle and is implemented on the resonator rear mirror. It is found that the low diffraction beam has a smaller M2 value than that of a Gaussian beam. The effects of the improved beam quality on a laser ablation process are investigated using a polymeric material. A theoretical model is provided to predict the laser ablated hole profile and penetration depth. The theoretical results are in agreement with the experimental measurements. Both the experimental and theoretical results show that the low diffraction beam has marked advantages over the Gaussian beam in ablation-dominated material removal processes in terms of larger depth and smaller taper at the same average power level.
Comparison of Femtosecond Laser-Induced Front- and Rear-Side Ablation of Films

W. J. Wang,K. D. Wang,G. D. Jiang,X. S. Mei,C. I. Yang

DOI: https://doi.org/10.1177/2041297510394071

2011-01-01

Proceedings of the Institution of Mechanical Engineers Part B Journal of Engineering Manufacture

Abstract:Femtosecond laser rear-side ablation, in which the laser beam first passes through the substrate, then irradiates on the film at the substrate–film interface, can be used to fabricate films on a transparent substrate. In this method, the material removal mechanism is different from that in front-side ablation, and the ablation occurs in an enclosed space. The different material removal process in rear-side laser ablation will bring about some unique ablation results. In this paper, the material removal mechanisms and ablation results of Cr film in rear-side ablation are investigated by comparing with those in front-side ablation. It is found that rear-side ablation can achieve smaller feature size than front-side ablation, especially when the laser fluence is small. However, owing to its different material breaking and ejecting process, the rear-side ablation tends to have worse bottom morphology and irregular edge morphology. In addition, the microstructures in the two ablations have opposite cross-sectional shapes and the ripple period in rear-side ablation is larger than that in front-side ablation.
Methodology of selective metallic thin film ablation from susceptible polymer substrate using pulsed femtosecond laser

Chresten von der Heide,Maria Grein,Günther Bräuer,Andreas Dietzel

DOI: https://doi.org/10.1364/OE.391084

2020-02-10

Abstract:Electronic devices are progressively fabricated on flexible substrates allowing new fields of applications. A maskless and very flexible structuring process is offered by ablation using ultra-short pulse laser irradiation. Usually, certain areas of a functional thin film coating are locally removed to yield the needed device structures. Micro laser patterning quality is not only influenced by the beam properties (beam profile, fluence) but also by pulse overlap, scan repetitions and many other factors such as substrate and coating material. This makes process parameter optimization a challenging task. In this paper, we present a systematic approach to efficiently find suitable parameters for laser-induced ablation of thin films on susceptible polymer substrates. As an example, we use a sputtered NiCr coating with a thickness of 100 $nm$ on a polyimide film made by spin coating of PI-2611 precursor (@ 2000 $rpm$ > ca. 8 ${\mu}m$, HD microsystems). Irradiation is conducted using a fs-laser with infrared wavelength of 1030 $nm$ and a pulse length of 212 $fs$. The energy per pulse is varied in the range of 0,29 ${\mu}J$ to 4,83 ${\mu}J$, yielding fluence values between 70 $mJ/cm^2$ and 1,11 $J/cm^2$. Ablation threshold fluence for a 100 $nm$ layer of NiCr was found to be ${\phi}_{th}$ ($N_P$:1)=0,50 $J/cm^2$ and the incubation factor was evaluated to be ${\xi}$=0,53. A clear distinction must be made between the material ablation at the surface of a bulk material and the selective removal of a thin film. In the second case effects such as flaking occur in practice and influence the ablation characteristic. We then investigate different varieties of thin film removal including dot-, line- and areal-ablation. The methodology is presented using a practical example, but can be applied to selective ablation of a wide range of thin film systems.

Applied Physics,Optics
Experimental Investigation of Polymeric Material Removal by Low Diffraction Laser Beam

Xuanhui Lu,Y. Lawrence Yao,Kai Chen

DOI: https://doi.org/10.1115/1.1445156

2002-01-01

Abstract:Effects of improved beam quality of a low diffraction laser beam on laser material removal processes are experimentally investigated in a polymeric material. The experimental results are in agreement with theoretical predictions. The results show that the low diffraction beam has marked advantages over the Gaussian beam in ablation-dominated material removal processes in terms of larger depth and smaller taper at the same average power level.
The Experimental Sutdy of Laser-induced Effect on the Film of Azopolymer by Ar+ Laser( Ⅱ )

赵鹭明,王立军

DOI: https://doi.org/10.3969/j.issn.1001-5078.2001.06.005

2001-01-01

Abstract:The paper describes the experimental process and r esults of laser-induced effect on the film of azopolymer by Ar+ laser(488nm). The laser-induced effects on the film of azopolymer with various pendant groups are presented.The relationship between the laser-induced effects on the azoben zene film and the graft ratios is also studied.
Study of simulation and experimental on the damage of stray light absorbing function films induced by nanosecond laser

Jingxiang Gao,Lihua Lu,Kaijie Wang,Yaowen Cui,Yongzhi Cao,Peng Zhang,Yunlong Du

DOI: https://doi.org/10.1016/j.matchemphys.2022.126003

IF: 4.778

2022-01-01

Materials Chemistry and Physics

Abstract:The functional film based on alumina/silica can greatly improve the absorptivity of stray light and effectively avoid the formation of high-order ghost light after multiple reflection of stray light in high-energy laser system, which can lead to material splashing and irreversible contamination of the high-energy laser system. This process is currently difficult to dynamically capture through experiments. Therefore, it is important and challenging to accurately analyze the multiple physical fields and damage evolution involved in the stray light action process by combining experiment and simulation and explore the response relationship between the action effect and laser parameters. In this paper, the mechanical properties parameters of the films were firstly determined by experiments combined with the inverse finite element method. The process of systemic stray laser with four typical energy densities irradiating on stray-light-absorbing functional films prepared by anodic oxidation and electrolysis was analyzed. We developed a dynamic thermal-mechanical-damage direct coupling model through ABAQUS and its secondary development, considering the temperature dependence of the thermodynamic and optical parameters of the three materials, the damage characteristics of brittle materials, and the adaptive progressive loading of the surface heat source boundary. Then, the multi physical fields and damage evolution with different material constitutive models were compared and analyzed. Compared with the JH-2 constitutive, bilinear constitutive is more suitable to describe the thermo-mechanical evolution of ceramic oxide functional films in the simulation of laser-irradiating process. The response relationship between damage and pulse number and the damage mechanism were analyzed from the perspective of experiment, which is in good agreement with the simulation results. The damage of functional films is not sensitive to the number of pulses but the damage is more sensitive to the initial defect, which can induce and enhance.
Fabrication of Microstructures by Rear-Side Picosecond Laser Irradiation of Two-Layer PMMA

Jiang Li,Wenjun Wang,Xuesong Mei,Aifei Pan

DOI: https://doi.org/10.1117/12.2306705

2018-01-01

Abstract:Micro-structures offer superior functions such as superhydrophobicity, selfcleaning, anti-wear and drag reduction. In this paper, various microstructures were fabricated by rear-side picosecond laser irradiation of two-layer materials. The material of underlying layer was commonly commercial available ink; the material of surface layer was PMMA. The high light absorptivity of underlying material result in significantly reduced absorption depth. The laser source could therefore be regarded as plane heat source, leading to better surface morphologies after the mater-laser interaction. The results showed that convex structures were obtained at a lower laser fluence; with increase of laser fluence, a doughnut-like structures were obtained; with further rise of laser fluence, bowl-like structures would be obtained. Moreover, the size of microstructures could be tuned by adjusting laser processing parameters such as laser power, frequency and laser-mater interaction time. This method provides an insight for fabrication of functional surface.
Formation of Polymer Micro-Bump with Laser Rear-Side Irradiation and Sacrificial Layer

Jinyou Shao,Linlin Miao,Yucheng Ding,Bing Hu,Xiangming Li,Ziwei Xie,Qiang chen

DOI: https://doi.org/10.1364/ltst.2012.mth4a.19

2012-01-01

Abstract:This article demonstrates a novel method to fabricate micro-bump on polymer surface by the laser rear-side irradiation. In this method, a metal sacrificial layer is prepared between the transparent substrate and the polymer.
Processing Microstructure on Film by Femtosecond Laser

Dong-Qing Yuan,Ming Zhou,Lan Cai,Jian-Ting Xu

IF: 0.6

2009-01-01

Optica Applicata

Abstract:Selective laser patterning of thin films in a multilayer film is an emerging technology for fabrication of MEMS devices. A 775 nm Ti:sapphire laser (130 fs, 1 kHZ) was used to irradiate,the thin film stacks with variations in process parameters such as feed rate and numerical aperture of objective lens. Femtosecond laser patterning of Au/Cr films which have the same thickness of about 1000 nm and are coated on glass substrate has been investiged to determine optimal parameters of the patterning process. Through a SEM and an AFM, we investigate the morphology of pattern, including the linewidth, groove depth and the laser-induced periodic surface structures (LIPSSs). The depth of the ablated groove was observed to depend on the scanning speed. And from the energy spectrum we find out which layer has been removed completely. The experimental results show that precise micromachining with desired stability and reproducibility can be achieved by controlling the ablation energy and the feed rate using appropriate numerical aperture (NA).
Direct Laser Interference Ablating Nanostructures on Organic Crystals

Hong-Hua Fang,Ran Ding,Shi-Yang Lu,Lei Wang,Jing Feng,Qi-Dai Chen,Hong-Bo Sun

DOI: https://doi.org/10.1364/ol.37.000686

IF: 3.6

2012-01-01

Optics Letters

Abstract:Two-beam interference ablation of 1,4-Bis(4-methylstyryl)benzene organic crystal by short laser pulses (10 ns, 355 nm) is presented. The influence of laser fluence, interference period, and pulse number on the morphology have been studied. The morphology is closely associated with the molecular interactions in the crystals, and it could be well controlled by adjusting the laser fluence and pulses number. Through interference ablating the crystals with high fluence pulses, and then treated with low fluence laser pulses, grating structures with smooth surface could be fabricated without any additional process.
Femtosecond laser ablation on gold-chromium film

Chengjuan Yang,Xuesong Mei,Wenjun Wang,Gedong Jiang,Kedian Wang,Mingjiang Ding

DOI: https://doi.org/10.3969/j.issn.1007-2276.2011.01.013

2011-01-01

Abstract:The relationship between the width of the linear microgrooves fabricated on the surface of metal film using a focused femtosecond laser and experiment parameters were explored through experiments. The microgrooves was in the gold-chromium film with a thickness of 150 nm coated on the glass-substrate and ablated by the laser which had wavelength of 800 nm with pulse duration (width) of 30 fs and pulse repetition rate of 1 kHz. The analysis of experimental results shows that changing the values of NA, the laser power, the scan speed and scan times will affect the width of microgrooves. It can be concluded that the width of linear microgrooves can be improved by decreasing the NA, increasing the laser power, slowing the scan speed or increasing the scan times. Furthermore, the rear-side laser ablation were confirmed through tests and compared with the results of front-side laser ablation. The results indicate that the front-side method is a more promising micromachining technique than the rear-side method on the aspects of machining quality and efficiency, and the reasons were analyzed.
Effects of Laser Fluence on Near-Field Surface Nanostructuring

Xuhui Feng,Xinwei Wang

DOI: https://doi.org/10.1016/j.apsusc.2008.01.016

IF: 6.7

2008-01-01

Applied Surface Science

Abstract:In this work, molecular dynamics simulation is performed to explore the long-time (up to 5ns) behavior of argon crystal in surface nanostructuring with an extremely localized near-field laser beam. The surface nanostructuring region is limited to tens of nanometers in diameter, although the simulated systems are much larger (comprised of more than 770,000 atoms). This study focuses on the long-time solidification and crystallization procedure, which is driven by the heat conduction in the material. The effect of the computational domain on the final nanostructure is studied in detail. Different laser fluences are used in the simulation to explore how and to what extent the energy input affects the dynamic melting behavior and the final dimension and profile of the surface nanostructure. In-depth theoretical investigation gives satisfactory explanation of the effect of the laser fluence on the melting depth. Spot-like structural defects in the sub-surface region are observed and investigated until full solidification.
Infrared Microlens Formation on Chalcogenide Polymer Surface Via Femtosecond Laser Pulse Ablation

Feng Liu,Xianda Li,Longyuan Yu,Xiaomo Zhang,Peng Li,Sheng Liu,Jiwei Zhang,Xuetao Gan,Weinan Li,Pengfei Wang,Xiangping Zhu,Jianlin Zhao

DOI: https://doi.org/10.1016/j.optlastec.2024.111679

IF: 4.939

2024-01-01

Optics & Laser Technology

Abstract:In this study, we introduced micro-optical surface formation via femtosecond (fs) laser pulse scanning to chalcogenide polymer (ChP), a promising material for costeffective infrared applications. Employing this method, we successfully fabricated a large-area poly(sulfur-random-(1,3-diisopropenylbenzene)) (S-r-DIB) r-DIB) microlens array (MLA) component. Each micro-concave spherical surface was crafted with a single fs laser pulse, serving as a micro-concave lens surface. We achieved a quasi- periodic MLA sample with over 2 x 105 5 micro-lenslets within a 10 mm x 10 mm footprint. Additionally, precise locating of laser pulse irradiation enabled us to create a hexagonal MLA with a filling factor over 37 %. Morphological investigations and imaging tests confirmed the adequate surface quality of the fabricated components, with its uniformity revealed by the virtual foci grid in near infrared region. To elucidate the forming conditions and mechanisms, we studied the evolution of surface morphology under various laser irradiation conditions. Laser induced damage thresholds of S70-r-DIB30 70- r-DIB 30 were experimentally determined for both 800 nm and 400 nm wavelengths under single- and multi-pulse irradiation scenarios. We identified the optimal fabrication fluence window as 115-205 mJ/cm2 2 with 800 nm single-pulse irradiation. The bandgap of the S70-r-DIB30 70- r-DIB 30 was estimated as 2.06 eV, and energy band analysis confirmed distinctions in ablation morphology. Furthermore, we investigated sub-surface morphology evolution using orthogonal ultrafast pump-probe imaging, revealing diversity compared to traditional inorganic and polymeric optical materials due to differing absorption and etching mechanisms. The elastic wave velocity of 3.2 km/s in this ChP and etching velocity of 0.7 mu m/pulse were experimentally determined. These findings deepen our understanding of ChP material interaction with fs lasers, offering insights for potential applications such as surface engineering, substrate cutting, and micro-structure formation.
Effect of laser ablation on the conductivity and laser-induced damage threshold of fused silica components

Wenhua Lou,Gang Liu,Baonan Jia,Jingming Gao,Xiaoning Guan,Jun Chen,Xiaoguang Ma,Pengfei Lu

DOI: https://doi.org/10.1142/s0217984925500514

2024-10-30

Modern Physics Letters B

Abstract:Modern Physics Letters B, Ahead of Print. When irradiated by high-power lasers, fused silica optical component can be ablated, which seriously affects their laser-conducing capability and service life. Numerical simulations have been applied to investigate the ablation process, laser-induced damage threshold (LIDT), and propagation loss of fused silica optical component. The depth of the ablation crater increases linearly with the duration of irradiation, while the rate of development in the width of the ablation crater gradually decreases. The LIDT of the front surface of the fused silica optical component will significantly decrease, while the propagation loss of the fused silica component will have a considerable increase when the front surface of fused silica is damaged under laser irradiation. The propagation loss and the LIDT of the fused silica's front surface are 26.49, 21.19, 20.60, 16.83, and 16.41[math]GW/cm2 and 0.41, 1.02, 2.24, 3.46, and 5.31[math]dB, respectively, after 50, 100, 150, 200, and 250[math][math]s of ablation. This work provides novel opportunities for investigating the intrinsic mechanism of laser-induced damage to fused silica, and offers guidance for the future development of fused silica optical elements that are highly resistant to laser-induced damage.

physics, condensed matter, applied, mathematical
Effect of two typical focus positions on microstructure shape and morphology in femtosecond laser multi-pulse ablation of metals

W WANG,X MEI,G JIANG,S LEI,C YANG

DOI: https://doi.org/10.1016/j.apsusc.2008.07.100

IF: 6.7

2008-01-01

Applied Surface Science

Abstract:In femtosecond laser multi-pulse ablation, the ablated surface is changing and the fluence irradiated on the ablated surface is determined by the distance between the focal plane and the target surface. Thus, the focus position is a significant process parameter. In this paper, the effect of two typical focus positions on the microstructure shape and morphology in the ablation of steel are explored. Experimental results indicate that the microgroove ablated by the convergent beam (where the focal plane is below the target surface) has a V-shape, while that ablated by the divergent beam has a U-shape. The groove shape is analyzed by simulation in which a scanning ablation model is proposed. The simulation results are in close agreement with our experiments, and different change of beam spot size in laser propagation is confirmed as the main reason for the difference in shapes. The groove morphologies ablated by the two kinds of beams are related to the scan speed. At a higher scan speed, the grooves ablated by the convergent beam have much better morphology than that ablated by the divergent beam. However, when scan speed is slower, the morphology appears quite the contrary. The distinction of morphology can be attributed to different effects of plasma,fluence and the laser irradiation direction on groove sidewalls. As the influence of focus position on ablation shape and morphology is made clear, adopting proper focus position becomes a feasible process control method to obtain microstructures with certain shape and morphology, which can meet the demand of some particular applications. (C) 2008 Elsevier B. V. All rights reserved.
Impact of Laser Fluence on Ablation Depth and Prediction of Morphology of Ablation Craters

Peng CHEN,Zhi-yong CHEN,You-peng CAO,Wei-hua ZHU,Hong-yu HE,Xin-lin WANG

DOI: https://doi.org/10.3969/j.issn.1673-1255.2016.01.006

2016-01-01

Abstract:The interaction between femtosecond laser and NiTi binary shape memory alloy is simulated by mo?lecular dynamics method combining with two-temperature model. The effects of femtosecond laser fluence on the ab?lation depth are investigated. In the simulation, the NiTi shape memory alloy film with the depth of 90 nm is irradiat?ed by the single pulse with the duration of 100 fs and the fluences varying from 0 to 125 mJ/cm2. The simulation re?sults show that two different ablation phases exist for single pulse ablating NiTi shape memory alloy. For lower flu?ence, the ablating result presents gentle ablation phase, the ablation depth is lower and related with the optical pene?tration depth. For higher fluence, the ablating result presents strong ablation phase and the ablation depth increases markedly. Predicting the morphology of NiTi target irradiated by the single pulse via mosaic approach shows that more flat ablation craters at the bottom can be obtained by using femtosecond laser fluence near the ablation thresh?old to irradiate the target.
Atomic‐Level Insight into the Formation of Subsurface Dislocation Layer and Its Effect on Mechanical Properties During Ultrafast Laser Micro/Nano Fabrication

Jiawang Xie,Jianfeng Yan,Dezhi Zhu,Guangzhi He

DOI: https://doi.org/10.1002/adfm.202108802

IF: 19

2021-11-23

Advanced Functional Materials

Abstract:Abstract Micro/nano processing technologies have been extensively studied since micro/nano structures are used in different area such as microelectronics and microdevices. As a high‐precision processing technology, ultrafast laser has been applied in the fabrication of different types of metallic micro/nano structures. However, the knowledge about the materials response of metals at atomic scale during laser processing is still necessary to explore. Herein, the femtosecond laser processing of metals from the atomic structure perspective is revealed. Three different layers named recast layer, high density dislocation layer, and unaffected layer are found after femtosecond laser irradiation. The recast layer is on the surface, which is generated from the resolidification of melting materials. The high density dislocation layer, consisting of dislocations and stacking faults, is observed beneath the irradiated surface. The dislocation layer is produced by the laser‐induced stress wave, and the mechanical properties of irradiated surface are affected by the laser‐induced subsurface dislocation layer. The unaffected layer is not affected by laser irradiation, and maintains the initial atomic structure. The research gives new information about the ultrafast laser processing of metals at atomic‐level, which is helpful to the fabrication of functional micro/nano devices for wide applications.

materials science, multidisciplinary,chemistry, physical,physics, applied, condensed matter,nanoscience & nanotechnology

Effect of laser fluence on sacrificial layer morphology in laser rear-side ablation of film

High-precision fabrication of Pd film by laser rear-side ablation with thick sacrificial layer

Effect of film properties on the material removing characteristics in femtosecond laser rear-side ablation of chromium film

Damage mechanism and morphology characteristics of chromium film in femtosecond laser rear-side ablation

A Low Diffraction Laser Beam As Applied to Polymer Ablation

Comparison of Femtosecond Laser-Induced Front- and Rear-Side Ablation of Films

Methodology of selective metallic thin film ablation from susceptible polymer substrate using pulsed femtosecond laser

Experimental Investigation of Polymeric Material Removal by Low Diffraction Laser Beam

The Experimental Sutdy of Laser-induced Effect on the Film of Azopolymer by Ar+ Laser( Ⅱ )

Study of simulation and experimental on the damage of stray light absorbing function films induced by nanosecond laser

Fabrication of Microstructures by Rear-Side Picosecond Laser Irradiation of Two-Layer PMMA

Formation of Polymer Micro-Bump with Laser Rear-Side Irradiation and Sacrificial Layer

Processing Microstructure on Film by Femtosecond Laser

Direct Laser Interference Ablating Nanostructures on Organic Crystals

Femtosecond laser ablation on gold-chromium film

Effects of Laser Fluence on Near-Field Surface Nanostructuring

Infrared Microlens Formation on Chalcogenide Polymer Surface Via Femtosecond Laser Pulse Ablation

Effect of laser ablation on the conductivity and laser-induced damage threshold of fused silica components

Effect of two typical focus positions on microstructure shape and morphology in femtosecond laser multi-pulse ablation of metals

Impact of Laser Fluence on Ablation Depth and Prediction of Morphology of Ablation Craters

Atomic‐Level Insight into the Formation of Subsurface Dislocation Layer and Its Effect on Mechanical Properties During Ultrafast Laser Micro/Nano Fabrication