Femtosecond laser ablation on gold-chromium film

Chengjuan Yang,Xuesong Mei,Wenjun Wang,Gedong Jiang,Kedian Wang,Mingjiang Ding

DOI: https://doi.org/10.3969/j.issn.1007-2276.2011.01.013

2011-01-01

Abstract:The relationship between the width of the linear microgrooves fabricated on the surface of metal film using a focused femtosecond laser and experiment parameters were explored through experiments. The microgrooves was in the gold-chromium film with a thickness of 150 nm coated on the glass-substrate and ablated by the laser which had wavelength of 800 nm with pulse duration (width) of 30 fs and pulse repetition rate of 1 kHz. The analysis of experimental results shows that changing the values of NA, the laser power, the scan speed and scan times will affect the width of microgrooves. It can be concluded that the width of linear microgrooves can be improved by decreasing the NA, increasing the laser power, slowing the scan speed or increasing the scan times. Furthermore, the rear-side laser ablation were confirmed through tests and compared with the results of front-side laser ablation. The results indicate that the front-side method is a more promising micromachining technique than the rear-side method on the aspects of machining quality and efficiency, and the reasons were analyzed.