Fabrication Large Area Photonic Crystals with Periodic Waveguide by One-Step Holographic Lithography Based on Spatial Light Modulator

Yongchun Zhong,Jie Ma,Kam Sing Wong,Zhe Chen,Jianying Zhou
DOI: https://doi.org/10.1117/12.2008759
2012-01-01
Abstract:A one-step introduction of functional defects into a photonic crystal (PC) is demonstrated. By using a multi-beam phasecontrolled holographic lithography and a diffracting optical element, large area one dimensional (1D) and two dimensional (2D) PCs with periodic waveguide were fabricated. The uniform area is up to 4 mm2, and tens of waveguide have been introduced in the one dimension and two dimension PC structure. This technique gives rise to a substantial reduction of the fabrication complexity and a significant improvement on the accuracy of the functional defects in photonic crystals. This method can also been used to design and fabricate metamaterials.
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