Abstract:Polymer-sorted high-density carbon nanotube (CNT) arrays have shown great potential to extend the silicon-based Moore's law. Imaging the CNT arrays on insulators like SiO 2 /Si using low-voltage scanning electron microscopy (LVSEM) to acquire array information like the alignment, density, and distribution of residual polymers is necessary. Such a task remains challenging due to the nanoscale CNT body (1–2 nm in diameter), nanoscale tube-to-tube separation (1–10 nm), the broadening of the apparent diameter, and the complex image contrast caused by the insulating substrate and polymer residues. In this study, the imaging mechanism for this system is investigated. Two methods are developed to separate the three dominant contrasts, i.e. topographic contrast, charge contrast, and material contrast, by selecting the take-off angle and energy of the emitted electrons as enabled by changing the working distance or the deceleration voltage. The contrast formation and separation mechanism is further confirmed by the dynamic contrast evolution due to the electron-beam-induced deposition of amorphous carbon. The contrast separation method is further applied to an individual CNT, reducing its apparent diameter from 36 nm to 6 nm. This result hints at the potential for LVSEM to count the density exceeding 150 CNTs/μm of CNT arrays. Finally, a comparative study of LVSEM and transmission electron microscopy confirms the failure of LVSEM to resolve CNTs in a bundle. The results suggest that the density of CNT arrays may be underestimated in reported SEM data. The proposed method can serve as a useful tool for further study and application of arrayed CNTs.

Direct Identification of Metallic and Semiconducting Single-Walled Carbon Nanotubes in Scanning Electron Microscopy.

Direct discrimination between semiconducting and metallic single-walled carbon nanotubes with high spatial resolution by SEM

Electrochemical Identification of Metallic and Semiconducting Single-Walled Carbon Nanotubes

Near-Field Optical Identification of Metallic and Semiconducting Single-Walled Carbon Nanotubes

Heterodyne High-Harmonic Electrostatic Force Microscopy with Improved Spatial Resolution for Nanoscale Identification of Metallic/Semiconducting Carbon Nanotubes

Scanning Electron Microscopy Imaging of Single-Walled Carbon Nanotubes on Substrates

Electrochemical identification of metallic and semiconducting single-walled carbon nanotubes using the water gate effect.

Scanning Electron Microscopy Imaging of Single-Walled Carbon Nanotubes and Devices

Why semiconducting single-walled carbon nanotubes are separated from their metallic counterparts.

Evaluating bandgap distributions of carbon nanotubes via scanning electron microscopy imaging of the Schottky barriers.

Why Semiconducting Single-Watted Carbon Nanotubes Are Separated From Their Metaltic Counterparts

Identification of the conductivity type of single-walled carbon nanotubes via dual-modulation dielectric force microscopy

High-Field Response And Direct Identification Of Metallic And Semiconducting Multiwalled Carbon Nanotubes

Using Nanoscale Thermocapillary Flows to Create Arrays of Purely Semiconducting Single-Walled Carbon Nanotubes

A generalized method for evaluating the metallic-to-semiconducting ratio of separated single-walled carbon nanotubes by UV-vis-NIR characterization

Raman microscopy mapping for the purity assessment of chirality enriched carbon nanotube networks in thin-film transistors

Electron Beam Interaction with Carbon Nanotubes in Scanning Electron Microscope: Mechanisms and Applications

Imaging mechanism and contrast separation in low-voltage scanning electron microscopy imaging of carbon nanotube arrays on SiO2/Si substrate

Imaging mechanism and contrast separation in low-voltage scanning electron microscopy imaging of carbon nanotube arrays on SiO 2 /Si substrate

High-throughput optical imaging and spectroscopy of individual carbon nanotubes in devices

Simultaneous dielectrophoretic separation and assembly of single-walled carbon nanotubes on multigap nanoelectrodes and their thermal sensing properties.