The Structure of TiOx Thin Film Studied by Raman Spectroscopy and XRD

WX Xu,S Zhu,XC Fu,Q Chen
DOI: https://doi.org/10.1016/s0169-4332(98)00589-3
IF: 6.7
1999-01-01
Applied Surface Science
Abstract:The structure of TiOx thin films have been studied by Raman spectroscopy. The spectra show that in the film plane, the atoms are connected in a way similar to that of bulk anatase. Due to the dimensional limitation, the stretching modes normal to the film plane, A1g+B1g (ν3+ν2), are suppressed. The dependence of this suppression on the calcination temperature and film thickness has also been investigated.
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