Research on Synthetic Endpoint Detection During CMP

Zhou Guoan,Liu Duoqin,Zhan Yang
DOI: https://doi.org/10.3969/j.issn.1671-4776.2009.06.010
2009-01-01
Abstract:Based on the analysis of the principle,characteristics and hardware of the motor current detection,the optical endpoint detection and the pad temperature detection,the endpoint detection effectiveness of the hardware circuit design was verified.The Nvision software of the STRASBAUGH was transplanted.As the precondition of polishing,the gain,offset,frequency and type of the digital filter were set.The process parameters were optimized and the tungsten was polished with TiN as the barrier,then the real-time signal curve was achieved.Combined with the three integrated signals,the most precise endpoint position was chosen.
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