Novel Method for Detection of Anomalous Structure Characteristics of ID Precision Ultrathin Monocrystalline Silicon Section Cutting Tool

Zong-nong Chen,Ming Guo,Qing-jiu Wang,Xue-gong Yu
DOI: https://doi.org/10.1007/bf03396450
2002-01-01
Journal of Zhejiang University SCIENCE A
Abstract:The structure characteristics of ID precision ultrathin monocrystalline silicon section cutting machine-tool spindle with force-monitoring bearings functioning as force measuring sensors were detected with the new Hilbert theory based signal-wave envelope detection method, presented to replace the conventional hardware device in order to ensure that the signal is measured online with high fidelity. According to the probability of anomalous incidents in the cutting process, a mathematical recognition model has been designed and verified on an STC-22ID machine.
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