Design of Magnetic Sensor System Based on Cesium Optical Pumping Magnetic Resonance

ZHANG Yang,WU Ji-yuan

DOI: https://doi.org/10.3969/j.issn.1007-2934.2011.03.004

2011-01-01

Abstract:In this paper,gives the principle of measurement magnetic based on cesium optical pumping magnetic resonance.By using the MEMS packaging and manufacturing technology,a cesium magnetic sensor chip system is designed.It can measure the weak magnetic field.

What problem does this paper attempt to address?

Design of CMOS magnetic sensor integrated circuit

Qing Guo,DaZhong Zhu,Yunruo Yao

DOI: https://doi.org/10.1109/icsict.2004.1435165

2004-01-01

Abstract:A new CMOS magnetic sensor integrated circuit has been developed in a 0.6μm CMOS technology. The single chip integration of the split-drain magnetic field-effect transistor (MAGFET) and the subsequent signal processing circuits is realized. With the pre-processing circuit and correlated double sampling (CDS) circuits, the fixed pattern noise (FPN) is greatly reduced. The MAGFET is sectorial with the radius of 48μm and the angle of 90 degree. The relative sensitivity of the magnetic sensor can be 87.3mV/(T·μs). © 2004 IEEE.
A Broadband NMR Magnetometer System with Field Searching and Automatic Tuning Function

Jianyu Zhao,Qing Yang,Frederik Dreyer,Daniel Krueger,Fedor Jelezko,Jens Anders

DOI: https://doi.org/10.1109/tim.2022.3222484

IF: 5.6

2023-01-01

IEEE Transactions on Instrumentation and Measurement

Abstract:In this article, we present a CMOS-based broadband nuclear magnetic resonance (NMR) magnetometer system with magnetic field searching and automatic tuning capabilities. The NMR front-end consists of a custom-designed NMR transceiver application-specific integrated circuit (ASIC) and an external LC resonance circuit formed by an NMR coil and a digitally tunable capacitor (DTC). With a 1-mm NMR coil, the system is designed to measure the magnetic fields between 0.54 and 2.54 T with nanotesla resolution. To this end, the system automatically sweeps its excitation frequency to acquire an NMR signal from a known sample inside the NMR coil. The measured frequency of the NMR signal, together with the known Larmor frequency of the sample, can then be used to determine the unknown magnetic field with very high precision. The presented system provides an optimum sensitivity over its entire frequency range by automatically tuning the LC resonant circuit to the current Larmor frequency using the DTC. With a 0.78-mu L sample of vegetable oil, the presented NMR magnetometer achieves an excellent field resolution of 1.77 nT inside a 1.45-T benchtop MR magnet, corresponding to a relative resolution of 1.2 ppb, which is limited by the field stability of the magnet. With its intrinsic frequency noise of 15 mHz, measured using a synthetic input signal, the presented sensor can support magnetic field resolutions down to 242 pT within a 1.45-T base field.
Cmos Magnetic Sensor Integrated Circuit with Sectorial Magfet

Q Guo,DZ Zhu,YR Yao

DOI: https://doi.org/10.1016/j.sna.2005.10.004

2006-01-01

Abstract:In this paper, a CMOS magnetic sensor integrated circuit (IC) for a perpendicular magnetic field is introduced. The sensor integrated circuit is designed and fabricated in a 0.6 mu m digital CMOS process. It consists of a pair of common-source split-drain magnetic field-effect transistor (MAGFET), a pre-processing circuit with a switches array, a correlated double sampling (CDS) circuit and a digital controlling part. The measurements of perpendicular magnetic field as well as the noise shaping are realized on-chip by the two functioning modes of the sensor integrated circuit.The MAGFET is sectorial with a radius of 48 mu m and an angle of 90 degrees, and the measured sensitivity SA (current-related sensitivity) is 3.61%/T. At the working frequency of 10 kHz, the sensitivity of the magnetic sensor is 2.62 V/T. (C) 2005 Elsevier B.V. All rights reserved.
A CMOS Magnetic Sensor Based on Synchronous Sampling Function

Tong Liu,Da-Zhong Zhu,Qing Guo

DOI: https://doi.org/10.1109/icsict.2006.306427

2006-01-01

Abstract:A CMOS magnetic sensor based on synchronous sampling function is presented in this paper. The integrated circuit is designed and fabricated with a 0.6 mum standard CMOS process, and the sector split-drain MAGFET is used as the sensing element to implement the correlated double sampling system. The sensor realizes the measurement of magnetic field as well as the noise-shaping through the synchronous sampling functioning modes: the measurement mode and the reference mode. The sensitivity of the magnetic sensor integrated circuit is 2.62V/T at the working frequency of 20 kHz
A CMOS Magnetic Sensor Integrated Circuits Based on the Synchronized Sampling Function of Sector MAGFET

GUO Qing,ZHU Da-zhong

DOI: https://doi.org/10.3969/j.issn.1004-1699.2006.06.006

2006-01-01

Abstract:Based on the synchronized sampling function of sector split-drain magnetic field-effect transistor (MAGFET), the CMOS magnetic sensor integrated circuit is designed and developed in a 0.6 μm standard CMOS technology. The sector MAGFET works as the magnetic sensor cell, which works at the synchronized sampling functioning modes: the measurement functioning mode and the reference functioning mode. The magnetic sensor integrated circuits realize the measurement of magnetic field as well as the noise-shaping by the synchronized sampling functioning modes. The measurements of the sensor IC indicate that the noise-shaping works well by the synchronized sampling function. The sensitivity of the magnetic sensor integrated circuit is 2.62 V/T at the working frequency of 20 kHz.
Design of Self-oscillating Cesium Optically Pumped Magnetometer

Yiming Huang,Manruo Luo,Zhaocai Wu,Hua Liu

DOI: https://doi.org/10.1007/978-981-19-6613-2_549

2023-01-01

Abstract:This paper introduces the Zeeman effect of alkali metal atoms, the principle of optically pumping and magnetic resonance. Based on the physics rationale of an optically pumped magnetometer, the mechanical and electrical structures of the OPM sensor are designed. Aimed at non-magnetic heating, a temperature control system of cesium vapor cell is designed with a flexible printed circuit as the heating element, and the temperature control accuracy reached 0.6 ℃. The circuit parameters of the differentiator are optimized, and a −90° phase shifter is designed to form the self-oscillating feedback loop with a phase shift bandwidth of more than 1 MHz. The experimental system of cesium optically pumped magnetometer is built, and the resonance signal with a high signal-to-noise ratio indicates that the intensity of the geomagnetic field in the laboratory environment is 34027.5 nT. The relationship between the OPM signal amplitude and the temperature of the cesium vapor cell is investigated. The results show that the optimal temperature of the cesium cell is 54.4 ℃. The sensitivity of the magnetometer prototype calculated according to the power spectrum reaches $$10\,\mathrm{ pT}/\sqrt{\mathrm{Hz}}$$ .
A CMOS Sectorial Split-Drain Magnetic Sensor IC

Qing GUO,Dazhong ZHU,Yunruo YAO

DOI: https://doi.org/10.3969/j.issn.1000-3819.2006.01.021

2006-01-01

Abstract:The CMOS magnetic sensor integrated circuit with sectorial split-drain magnetic field-effect transistor (MAGFET) is designed and developed in a 0. 6 μm standard CMOS technology. The design is consisted of the sectorial split-drain magnetic field-effect transistor as the magnetic sensor cell, the pre-processing circuit with two functioning modes, the correlated double sampling (CDS) circuits and the digital controlling circuits. The sensor integrated circuit is designed to realize the measurement of magnetic field, as well as the noise-shaping with the mode of magnetic field shielding, and the noise of the sensor cell and the signal processing circuit is greatly reduced. The sensitivity of the magnetic sensor integrated circuit is 2. 62 V/T at the working frequency of 10 kHz.
Compatible CMOS Sensor IC of Magnetic Sensor and Photoelectric Quadrants Sensor

郭清,韩雁,朱大中

DOI: https://doi.org/10.3969/j.issn.1000-3819.2009.01.029

2009-01-01

Abstract:A new compatible CMOS sensor integrated circuits of magnetic sensor and photoelectric quadrants sensor is designed and fabricated in a 0.6 μm standard CMOS process. It realizes the single chip integration of the magnetic sensor and photoelectric quadrants sensor with the compatible analog processing circuits,with advanced magnetic sensitivity (0.036 1 T-1) and optical sensitivity (2 V/lx·s). In the design of processing circuits,the active pre-processing circuits and the CDS (correlated double sampling) circuits are introduced to realize the signal sampling and noise elimination.
Study on the Sensitivity of Laser-Pumped Cesium Atomic Magnetometer

Li Nan,Huang Kai-Kai,Lu Xuan-Hui

DOI: https://doi.org/10.7498/aps.62.133201

IF: 0.906

2013-01-01

Acta Physica Sinica

Abstract:A cesium atomic magnetometer based on laser-pumped rf resonance has been investigated and demonstrated experimentally. Atoms are polarized and pumped to dark states by circularly polarized light. When there exists a magnetic field, the corresponding magnetization will be precessing around the magnetic field at Larmor frequency. By means of adding a resonant rf magnetic field, the atoms will be depolarized and absorb photons again. By detecting the spectrum of the transmitted light, one can obtain the information about the external magnetic field. We build an 894nm external cavity diode laser with a frequency stabilization device, and a low noise magnetic field measurement environment. After the optimization of the magnetometer parameter and closed-loop measurement, an ultimate sensitivity of 19 fT/Hz(1/2) and an intrinsic sensitivity of 1.8 pT/Hz(1/2) have been achieved with the spatial resolution smaller than 2 cm.
A High Sensitivity Laser-Pumped Cesium Magnetometer

Huang Kai-Kai,Li Nan,Lu Xuan-Hui

DOI: https://doi.org/10.1088/0256-307x/29/10/100701

2012-01-01

Chinese Physics Letters

Abstract:An atomic magnetometer based on optically detected magnetic resonance is investigated and demonstrated experimentally. We build an 894 nm external cavity diode laser which is frequency locked to the F = 4 -> F' = 3 transition of Cs D-1 line with DAVLL spectroscopy. With the phase-locked loop, the frequency of the rf coils is actively locked to the Larmor frequency and the magnetometer tracks the magnetic field variations in a phase coherent manner. An ultimate sensitivity of 19 fT/Hz(1/2) and an intrinsic sensitivity of 8.6 pT/Hz(1/2) in the magnetic environment which is close to geomagnetic field have been achieved with the spatial resolution smaller than 2 cm.
A Chip-scale Magnetic Field Sensor Based on Frequency Readout Cavity Optomechanical System

Zhe Li,Chengwei Xian,Pengju Kuang,Jinglong Xiong,Zihan Huang,Senyu Zhang,Guangjun Wen,Kai Chen,Yongjun Huang

DOI: https://doi.org/10.1109/piers62282.2024.10617832

2024-01-01

Abstract:In this paper, the working principle of cavity optomechanical system is analyzed, and a new chip-scale magnetic field sensor based on frequency readout cavity optomechanical system is proposed. The relationship between the magnetic field and displacement of the mechanical part of the new chip-scale magnetic field sensor is verified, the structure and parameters of the new chip-scale magnetic field sensor are simulated and designed, the optical characteristics of two-dimensional photonic crystal microcavity are simulated and analyzed, and the mechanical resonant frequency of the cavity affected by the displacement and the input laser wavelength and intensity is demonstrated. Then, the whole magnetic field sensor is simulated and analyzed. The results show that when the input laser intensity is 199µW, the sensitivity is 7.9Hz/µT. The new chip-scale magnetic field sensor simulated in this paper has important application value in the fields of navigation, positioning, magnetic imaging, medical imaging and environmental monitoring.
Design and experiment of MEMS magnetic sensor

Jie Chen,Ming Qin,Qing'an Huang

DOI: https://doi.org/10.3969/j.issn.1001-0505.2011.05.007

2011-01-01

Abstract:A new sensor of measuring magnetic field using a U-shaped beam driven by Lorentz force is presented. The magnetic field is obtained by measuring the induced electromotive voltage of the coil of the mechanical structure. The theoretical model and the response of the sensor are analyzed using the vibration theory. The resonance frequencies and modes of the resonators are simulated by the general purpose finite element program ANSYS. These micro-electro-mechanical systems (MEMS) devices are realized through a standard CMOS process coupled with a post-processing phase. A laser Doppler vibrometer system is implemented to measure the vibration amplitudes and the frequency of the fabricated structure. The relationship between the induced voltages of the sensor and the external magnetic field and the current is tested. And the sensor exhibits a resolution of 14 mV/mT. A good agreement is observed between the predicted and observed behavior of the magnetic field sensor. The sensor is of simple structure and easy fabrication. It can be used for magnetic field of mT level.
Design and Measurement of Microelectromechanical Three-Axis Magnetic Field Sensors Based on the CMOS Technique

Chi-Han Wu,Cheng-Chih Hsu,Yao-Chuan Tsai,Chi-Yuan Lee,Ching-Liang Dai

DOI: https://doi.org/10.3390/mi14051038

2023-05-12

Abstract:The design, fabrication, and measurement of a microelectromechanical system (MEMS) three-axis magnetic field sensor (MFS) based on the commercial complementary metal oxide semiconductor (CMOS) process are investigated. The MFS is a magnetic transistor type. The performance of the MFS was analyzed employing the semiconductor simulation software, Sentaurus TCAD. In order to decrease the cross-sensitivity of the three-axis MFS, the structure of the MFS is planed to accommodate two independent sensing components, a z-MFS utilized to sense magnetic field (M-F) in the z-direction and a y/x-MFS composed of a y-MFS and a x-MFS to be utilized to sense M-F in the y- and x-directions. The z-MFS incorporates four additional collectors to increase its sensitivity. The commercial 1P6M 0.18 μm CMOS process of the Taiwan Semiconductor Manufacturing Company (TSMC) is utilized to manufacture the MFS. Experiments depict that the MFS has a low cross-sensitivity of less than 3%. The sensitivities of z-, y-, and x-MFS are 237 mV/T, 485 mV/T, and 484 mV/T, respectively.
A Laser-Pumped Cs −4 He Magnetometer for Metrology

Fu Jiqing,Wang He,Peng Xiang,Zhang Wei

DOI: https://doi.org/10.1109/cpem.2018.8501178

2018-01-01

Abstract:This paper describes a laser-pumped cesium-helium magnetometer (CHM) with high polarization efficiency. The magnetic-resonance signal amplitude has been improved by one order of magnitude comparing with the lamp-pumped scheme. The optimal parameters for increasing the signal-to-noise ratio of the magnetometer are obtained and discussed.
A Laser-Pumped Cs<sup>−4</sup>He Magnetometer for Metrology

Fu Jiqing,Wang He,Peng Xiang,Zhang Wei

DOI: https://doi.org/10.1109/CPEM.2018.8501178

2018-01-01

Abstract:This paper describes a laser-pumped cesium-helium magnetometer (CHM) with high polarization efficiency. The magnetic-resonance signal amplitude has been improved by one order of magnitude comparing with the lamp-pumped scheme. The optimal parameters for increasing the signal-to-noise ratio of the magnetometer are obtained and discussed.
Digital-locking optically pumped cesium magnetometer

rongye shi,chang liu,sheng zhou,yanhui wang

DOI: https://doi.org/10.1109/EFTF.2014.7331448

2014-01-01

Abstract:Lamp-based optically pumped Cesium magnetometer is one kind of commercial quantum magnetometers. In whatever military or civil magnetic field measurement, the practical optically pump magnetometer possesses a very important application value as well as prospect. This paper presents a portable lamp-pumped and digital-locking cesium atomic magnetometer, including the probe for detecting Zeeman transition signal and the digital servo system for locking the Zeeman transition frequency based on NI PCI-4461. The probe is lamp-based and as compact as 17 cm × 6 cm × 6 cm in size. The design of the servo system is to use frequency switching (at two frequencies) to create two corresponding voltages from the probe. When the voltages are equal, the center of the two frequencies appears to be the Zeeman transition frequency. The measurement of the magnetic field is experimentally realized with the noise level of 22 pT. The magnetometer is portable and highly compact with good sensitivity and has the potential of practical usage in the future.
An Array Cmos Magnetic-Field Sensor

XY ZHENG,DS ZHANG,LT LIU,ZJ LI

DOI: https://doi.org/10.1016/0924-4247(93)80154-9

1993-01-01

Abstract:An array integrated magnetic-field sensor has been fabricated by CMOS processing technology. It works in a new mode, and has current-mode output with an on-chip reference current source. The array form of the sensitive units increases the signal-to-noise ratio and the sensitivity. The sensor has good linear characteristics.
A Laser-Pumped Cs-He-4 Magnetometer For Metrology

Fu Jiqing,Wang He,Peng Xiang,Zhang Wei

2018-01-01

Abstract:This paper describes a laser-pumped cesium-helium magnetometer (CHM) with high polarization efficiency. The magnetic-resonance signal amplitude has been improved by one order of magnitude comparing with the lamp-pumped scheme. The optimal parameters for increasing the signal-to-noise ratio of the magnetometer are obtained and discussed.
A 1D Magnetoelectric Sensor Array for Magnetic Sketching

Zhaoqiang Chu,Weiliang Shi,Huaduo Shi,Qingxiao Chen,Lei Wang,Mohammad Javad PourhosseiniAsl,Chijie Xiao,Tianyu Xie,Shuxiang Dong

DOI: https://doi.org/10.1002/admt.201800484

IF: 6.8

2019-01-01

Advanced Materials Technologies

Abstract:Although various magnetic sensors have been developed, tiny magnetic object detection is still a challenging issue in some cases, such as capsule position detection, endoscope navigation, and the detection of magnetic devices hidden in/on the human body. In this paper, a magnetic detecting and sketching system utilizing a 1D magnetic sensor array with 56 magnetoelectric (ME) sensing units is proposed. The ME sensors used in this system are based on a (1-1) connectivity Metglas/piezofiber composite operating in the longitudinally magnetized and transversely poled (L-T) mode. Simulation and experiment results show that the proposed magnetic detecting system can not only monitor the 2D position of a running magnetic metal object, but it can also identify its posture and length-diameter ratio. The proposed magnetic detecting method is, therefore, very promising for medical magnetic positioning and security checking.
A New Chip-Scale Magnetic Field Sensor Based on Oscillation Mode Optomechanical Detection

Zhe Li,Pengju Kuang,Chengwei Xian,Yifan Wang,Kai Chen,Yongjun Huang

DOI: https://doi.org/10.1109/i2mtc60896.2024.10560615

2024-01-01

Abstract:In this paper, we demonstrate a chip-scale optomechanical resonator driven into oscillation mode for new magnetic field sensing. The new sensing device based on nanofabrication uses the slot-type photonic crystal cavity for detection, which has the advantages of high sensitivity, high detection precision and frequency readout. Firstly, combined with the principle of the optomechanical system, the overall structure design of the optomechanical sensor based on Lorentz force for magnetic field detection is proposed. Then, the detection sensitivity of the designed optomechanical magnetic field sensor is analyzed. The simulation results show that the magnetic field detection sensitivity is 7.9Hz/,.. T when the input laser intensity is 199,.. W. Finally, the mechanical mode of the magnetic field sensor is simulated and designed, and the resonant data of the operating mode is obtained by testing. The results show that the new optomechanical magnetic field sensor has the characteristics of high sensitivity, low noise and can be widely used in future miniaturization, high precision, weak magnetic field and other applications.

Design of Magnetic Sensor System Based on Cesium Optical Pumping Magnetic Resonance

Design of CMOS magnetic sensor integrated circuit

A Broadband NMR Magnetometer System with Field Searching and Automatic Tuning Function

Cmos Magnetic Sensor Integrated Circuit with Sectorial Magfet

A CMOS Magnetic Sensor Based on Synchronous Sampling Function

A CMOS Magnetic Sensor Integrated Circuits Based on the Synchronized Sampling Function of Sector MAGFET

Design of Self-oscillating Cesium Optically Pumped Magnetometer

A CMOS Sectorial Split-Drain Magnetic Sensor IC

Compatible CMOS Sensor IC of Magnetic Sensor and Photoelectric Quadrants Sensor

Study on the Sensitivity of Laser-Pumped Cesium Atomic Magnetometer

A High Sensitivity Laser-Pumped Cesium Magnetometer

A Chip-scale Magnetic Field Sensor Based on Frequency Readout Cavity Optomechanical System

Design and experiment of MEMS magnetic sensor

Design and Measurement of Microelectromechanical Three-Axis Magnetic Field Sensors Based on the CMOS Technique

A Laser-Pumped Cs −4 He Magnetometer for Metrology

A Laser-Pumped Cs<sup>−4</sup>He Magnetometer for Metrology

Digital-locking optically pumped cesium magnetometer

An Array Cmos Magnetic-Field Sensor

A Laser-Pumped Cs-He-4 Magnetometer For Metrology

A 1D Magnetoelectric Sensor Array for Magnetic Sketching

A New Chip-Scale Magnetic Field Sensor Based on Oscillation Mode Optomechanical Detection