The angle-limited integrated scattering (ALIS) measurement system for in-workshop inspection of the optical polishing process

Haiming Wang
DOI: https://doi.org/10.1016/0030-3992(94)90120-1
IF: 4.939
1994-01-01
Optics & Laser Technology
Abstract:A simple angle-limited integrated scattering (ALIS) measurement technique is described. The relation between the measured scattering within a limited solid angle (ALIS) and the root-mean-square (RMS) roughness of the surface under test is investigated. The technique is applied to the in-workshop inspection of the optical polishing process.
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