Theoretical and Experimental Research on a Novel Data Readout Method for SPM-Based High Density Data Storage

XU Xiao-hui,ZHAOGang,WEN Li,WU Ya-lei,CHU Jia-ru
DOI: https://doi.org/10.3969/j.issn.1004-1699.2006.05.097
2006-01-01
Abstract:A novel data readout method based on equivalent capacitance detection is developed for SPM-based high density data storage. A self-excited vibrating piezoelectric cantilever is used for data readout at its resonant frequency by cyclic contact mode. When the cantilever tip scans over the data bits, an additional external stress on the PZT layer induced by tip deflection leads to the changes of the dielectric constant as well as the capacitance of the cantilever. The experimental results indicated that the capacitance detection method has a displacement resolution of about 1 nm.
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