Abstract:Based on the applications in ultra-high-density data storage, a novel micro piezoelectric cantilever is designed, and the probe fabrication process arrangement is made as well. After a more accurate cantilever model is founded, formulas of elastic constant and resonance frequency are educed for non-rectangle cross-sectioned multi-layered composed cantilevers. Calculated with these formulas, the elastic constant and resonance frequency of the designed cantilever probe are 4 N/m and 245 kHz, respectively. By studying the effects of cantilever’s geometric parameters on mechanical performance, the cantilever structure is optimized for ultra-high-density data storage.

Structural Design of Novel Micro Piezoelectric Cantilevers with Low Stiffness and High Resonance Frequency