Methods of Improving Charge Sensitivity of Piezoelectric Microprobe in Surface Data Reading

吴绍勇,许晓慧,吴亚雷,赵钢,褚家如
DOI: https://doi.org/10.3969/j.issn.1672-6030.2008.04.003
2008-01-01
Nanotechnology and Precision Engineering
Abstract:The piezoelectric charge sensitivity of nano-scaled data reading in atomic force microscopy(AFM) probe-array-based ultrahigh density data storage was studied.The sensitivity can be increased by two ways.Firstly,the sensitivity can be increased 50% by improving the design of passivation layer on the upper electrode.Secondly,the effective transverse piezo-electric coefficient of lead zirconate titanate(PZT) thin film d31 can be increased by introducing a direct current(DC) bias voltage in data readout circuit,which will further the increase of the sensitivity.Based on direct piezoelectric effect,sol-gel derived PZT thin films prepared on Si wafer cantilever have been used to validate the effect of DC bias voltage on d31.Effec-tive transverse piezoelectric coefficient d31 was enhanced from -48 pC/N to -120 pC/N by increasing DC bias voltage from 0 V to 10 V.
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