Strain Effects On Auger Electron Spectroscopy In Different Regions Of Epitaxial-Lateral-Overgrowth Gan

D Cai,Jy Kang
DOI: https://doi.org/10.1002/pssc.200303383
2003-01-01
Abstract:The epitaxial-lateral-overgrowth GaN was analysed by Auger Electron Spectroscopy (AES). Auger peak shifts were measured in selective regions. By comparing to theoretical ab initio calculations, compressive strain distributions in different overgrowth regions were discussed. (C) 2003 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
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