Abstract:As well-known,heteroepitaxial growth on sapphire is mainly employed to obtain optoelectronic(devices) because there is no suitable substrate matching with GaN.Therefore,the GaN layer suffers from a stress due to large difference in lattice constants and thermal expansion coefficients between the GaN and sapphire.To improve the quality of devices,the epitaxial lateral overgrowth(ELO) technique is applied to GaN.ELO-GaN on patterned SiO_2/GaN/α-Al_2O_3 substrate is grown by metalorganic chemical vapor deposition(MOCVD).First,a high quality 3 μm thick layer of GaN is grown by MOCVD.Next,standard deposition and photolithographic techniques are employed to prepare a set of parallel SiO_2 stripes oriented along a(〈11-00〉) GaN crystal direction separated by window areas which expose the underlying GaN.A second deposition of GaN onto this patterned substrate is then initiated.During the initial GaN growth,the SiO_2 stripes function as nonwettable surfaces and no GaN deposition occurs on them.However,once the GaN film growth from the window stripes reaches the tops of the SiO_2 stripes,epitaxial lateral overgrowth of GaN commences.The GaN thickness of the second step growth is about 10 μm.The results of a systematic study of the ELO-GaN on sapphire are reported.Atomic force microscopy(AFM) images showed that the surface of ELO-GaN is smooth and that there are linear-configuration hillocks in the middle of mask region,which are caused by the misorientation of crystalline when the ELO-GaN coalesce above the masks.The X-ray diffraction(XRD) curve revealed that the tilts in the(〈11-20〉) direction between GaN in window regions and mask regions are about 1.2°.Raman scattering spectrum revealed that the stress in the mask region is smaller than that in the window region and also the quality of GaN is much higher in the mask region.As a result,the quality of GaN crystalloid is effectively improved by MOCVD using the ELO technique.

Lateral epitaxial overgrowth of GaN using diethyl gallium chloride in metal organic vapor phase epitaxy

Epitaxial Lateral Overgrowth of GaN with Chloride-Based Growth Chemistries in Both Hydride and Metalorganic Vapor Phase Epitaxy

Lateral Epitaxial Overgrowth of Nitrogen Polar GaN on Smooth Nitrogen Polar GaN Templates by Metalorganic Chemical Vapor Deposition

Epitaxial Lateral Overgrowth Of Gan By Hvpe And Movpe

Lateral and Vertical Growth Study in the Initial Stages of GaN Growth on Sapphire with ZnO Buffer Layers by Hydride Vapor Phase Epitaxy

Epitaxial Lateral Overgrowth of High Quality GaN by MOCVD

Structural Characterization of Epitaxial Lateral Overgrowth GaN by MOCVD

Epitaxial Lateral Overgrowth Of Gan On Si Substrates By Hydride Vapor Phase Epitaxy

Dislocation Reduction Through Nucleation and Growth Selectivity of Metal-Organic Chemical Vapor Deposition GaN

Microstructures of GaN Films Laterally Overgrown on Si(111) by Hydride Vapour Phase Epitaxy

Dislocation Reduction in GaN on Sapphire by Epitaxial Lateral Overgrowth

Epitaxial lateral overgrowth of GaN on molecular beam epitaxy GaN buffer layers on Si substrates by hydride vapour phase epitaxy

Investigation of the Crystal Tilts in Laterally Epitaxial Overgrowth Gan Films Formed by Hydride Vapor Phase Epitaxy

Investigation of Dislocations and Defects in Epitaxial Lateral Overgrown GaN by Photoelectrochemical Wet Etching

Structural Properties of Laterally Overgrown Gan

Epitaxial Lateral Overgrowth of Nitrogen-Polar (0001̅) GaN by Metalorganic Chemical Vapor Deposition

Hydride vapor phase epitaxy growth of GaN on sapphire with ZnO buffer layers

Optical Properties Evolution of GaN Film Grown Via Lateral Epitaxial Overgrowth

Growth of GaN Quasi‐substrates by Hydride Vapor Phase Epitaxy

Mechanisms of the Sidewall Facet Evolution in Lateral Epitaxial Overgrowth of Gan by Mocvd

Analysis of GaN Crystal Growth Mechanism in Liquid-Phase Epitaxial Na-flux Method