Abstract:Micro-air-gap-based extrinsic Fabry-Perot interferometers (EFPIs) are used for a variety of applications in sensing and communications, and are typically made by manual cleaving or hydrofluoric acid etching.1–4 They offer a number of useful properties including in-line operation from an all-fiber device, compactness, and good temperature stability. Mass-producing EFPIs is difficult, however, because the process involves manual alignment, assembly, and adhesion. This increases the cost and variability between devices. We report the first demonstration of a fiber in-line etalon with a self-enclosed cavity that has excellent characteristics. This etalon is fabricated using 157nm laser micromachining. Its properties include excellent interferometric fringe visibility of up to ∼30dB, which we believe is the best visibility yet reported for an all-fiber in-line etalon. It also offers great mass-production potential: good reproducibility and low cost are possible because the laser micromachining process can be automated. Finally, this etalon design offers excellent temperature stability. The 157nm laser micromachining system consists of a pulsed laser, an optical focusing system with 25 × demagnification, an observing system, and a precise translation stage system (see Figure 1). Because the 157nm source has high single-photon and pulse energy and a high absorption coefficient for many materials, it offers ideal characteristics for high quality micromachining. The process of forming the self-enclosed fiber Fabry-Perot (FP) cavity is shown in Figure 2. First, a circular micro-hole with a typical depth and diameter of tens of micrometers is made at the tip of a cleaved optical fiber by the 157nm laser. Next, an inline FP cavity is enclosed by simply splicing the first fiber to another cleaved fiber. Hence, such a micro etalon can be operated in high temperature environments of up to ∼800◦C and the selfclosed structure makes the etalon robust, stable, and reliable. It is also insensitive to temperature change due to the hollow core Figure 1. Schematic of the micromachining system with a 157nm excimer laser.

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