An Interference Signal Processing Method for Displacement Measurement by Dual Wavelength and Single Grating
Guochao Wang,Shuhua Yan,Dongxing Yang,Weihong Zhou,Xuedong Xie
DOI: https://doi.org/10.1117/12.904076
2011-01-01
Abstract:Displacement measurement by dual wavelength and single grating integrates the single grating diffraction theory and the heterodyne interference theory. By taking advantage of the two theories, it solves the contradiction between large range and high precision in grating displacement measurement quite well. In order to obtain nanometer resolution and nanometer precision, high-power subdivision of interference fringe must be realized accurately. According to phase demodulation theory for heterodyne interference signal, a digital phase measuring method is proposed by combining frequency-mixing technique and pulse-filling method. The whole signal processing part, which is based on FPGA and PLL, has been designed to realize the integer period measurement and high-powered subdivision of the decimal phase. Through experiments, it is validated that the phase range is [-180 degrees, 180 degrees], and the phase measurement resolution and the phase precision are above 0.03 degrees and 0.1 degrees, respectively. Moreover, the displacement measurement resolution and the displacement precision, corresponding to the phase indexes, are 0.167nm and 0.556nm, respectively.