The Grating Displacement Measurement and Application Based On DSP

Ying Zhong-yang,Ma Xiu-shui,Li Guang

DOI: https://doi.org/10.3969/j.issn.1671-802X.2007.04.037

2007-01-01

Abstract:This paper introduces the grating displacement measurement and application in the digital control system displacement measurement based on DSP.

What problem does this paper attempt to address?

Research on Integrated Grating Subdividing Digital Display Device Based on DSP

LIU Jiao,ZHUANG Zhi-tao,LIU Wan-yu

DOI: https://doi.org/10.3969/j.issn.1673-1255.2008.04.012

2008-01-01

Abstract:A new hardware system is designed.The digital displacement measurement is implemented by using optical grating displacement sensor and DSP.The signal is divided by phase-shifting resister chain,and then it is direction-discriminated and further divided by using internal QEP circuit of TMS320LF2407A,in order to obtain the high precision of displacement measurement.The experimental results show that the method has high integration,good real-time and high precision.
A High-precision Displacement Measuring System in SPC

Jianjun Yin,Zhonghua Yu,Zhaotong Wu

DOI: https://doi.org/10.3321/j.issn:0254-3087.2005.05.014

2005-01-01

Abstract:To solve the problems that companies usually face when using statistical process control (SPC) in the quality control. The main framework of high-precision displacement measuring system is proposed. The methods of system design and optimization based on LVDT sensor are given. The technologies of network and data stream protocol of system are also discussed. The performance of the measuring system is evaluated with measurement system analysis (MSA). The result shows that this measuring system has features of stability, high precision, low cost, large volume of data storage and network function, and so on, the system is worth popularizing for application.
Development of Precise Displacement Measurement System Based on DSP

FENG Liang,WANG Xing-song

DOI: https://doi.org/10.3969/j.issn.1672-1616.2007.19.015

2007-01-01

Abstract:Based on a general overview of existing methods and highlighting their features and disadvantages, it designs a measurement system utilizing both qudrature pulse subdivision method and compound functions interpolation method, develops the system with a TMS320F2812 digital signal processor. QEP unit can be used to subdivide qudrature pulse by 4 times. The system uses an integrated A/D Converter module to sample Moire signals. The results processed by the software will be displayed on LEDs, and is proves that this system can effectively improve the resolution of gratings by 200 times.
A High-Resolution Displacement Sensor Based on a Grating Interferometer with the Phase Modulation Technique

Shuangshuang Zhao,Changlun Hou,Juan Zhang,Jian Bai,Guoguang Yang

DOI: https://doi.org/10.1088/0957-0233/23/10/105102

IF: 2.398

2012-01-01

Measurement Science and Technology

Abstract:A high-resolution displacement sensor based on a grating interferometer with the phase modulation technique is demonstrated in this paper. The grating interferometer is formed with a grating and a mirror, which is fixed on a piezoelectric translator to generate phase modulation. The detected signal is intensity-modulated and processed with a lock-in amplifier for demodulation. Experimental results show that this displacement sensor has a displacement sensitivity of 19.8 mV nm(-1) and a high-resolution displacement detection of 0.05 nm in the linear region.
Nanometer-scale Displacement Sensor Based on Phase-Sensitive Diffraction Grating.

Shuangshuang Zhao,Changlun Hou,Jian Bai,Guoguang Yang,Feng Tian

DOI: https://doi.org/10.1364/ao.50.001413

IF: 1.9

2011-01-01

Applied Optics

Abstract:In this paper, a nanometer-scale displacement sensor based on a phase-sensitive diffraction grating with interferometeric detection is described and experimentally demonstrated. The proposed displacement sensor consists of a coherent light source, a microstepping motor controller, an integrated grating, a mirror, and a differential circuit. Experimental results show that the displacement sensor has a sensitivity of about 6 mV/nm and a resolution of less than 1 nm. This displacement measurement is an attractive technology with high sensitivity, broad dynamic range, good reliability, and immunity to electromagnetic interference.
Study of Fiber Grating Displacement Sensor

王冬生,王桂梅,潘玮炜,张凯

DOI: https://doi.org/10.3969/j.issn.1002-1841.2008.09.003

2008-01-01

Abstract:On the basis of analyzing and researching the principle of demodulation technique for FBG,a scheme of demodulation technique for FBG,which was based on cantilever tuning and the demodulation technique on a pair of matched FBG was designed.The relation between the wavelength shifts of sensing FBG and the wavelength shifts of reference FBG were studied,and each part of the system was designed.Stepping motor transformed the electricity pulse signal into angle-displacement or line-displacement's open-loop control part,in the non-overload situation,the electrical machinery rotational speed and the stopping position was only decided by the pulse signal's frequency and the pulse number,and was not influenced by the variation of load.This system has the characteristic of simply structure,high precision and low cost.
Research on the Application of DSP in the Magnetostrictive Displacement Sensor

LIU Yang,HE Xiao-gang,NIU Yu-guang

DOI: https://doi.org/10.3969/j.issn.1005-6033.2007.08.091

2007-01-01

Abstract:This paper introduces the features that the sensor detects the signal, analyzes on the design of the digital filter, and advances the methods for FIR digital filter and carries out the experiment.
Interferometric Precision Displacement Measurement System Based on Diffraction Grating

Lv Qiang,Li Wen-hao,Bayanheshig,Bai Yang,Liu Zhao-wu,Wang Wei

DOI: https://doi.org/10.3788/co.20171001.0039

IF: 1.1

2017-01-01

Chinese Optics

Abstract:This paper introduces the principles and the characteristics of the grating displacement measurement system based on geometric moire fringe and the principle of diffraction and interference.It summarizes the research progress of the diffraction grating interferometer displacement measurement system at home and abroad and its key problems and development trend.The advantages of the diffraction grating interferometer displacement measurement system are that low the effect of environment requirement,high resolution and precision,compact structure and low cost.The problems of this system needed to be solved include how to improve the fabrication and installation accuracy of grating and optical components,and seek a higher accuracy of detection means to calibrate the grating displacement measurement system and so on.The development trend of the system is higher resolution and accuracy,larger range,multi-dimensional measurement and more compact structure.The diffraction grating interferometer displacement measurement system will have a wider application prospect in the field of modern industrial processing and manufacturing.
A high speed and high precision displacement measurement method using double grating scales

De-gang JIE,Yan-jie LIU,Li-ning SUN,Zhi-chao CHEN,He-gao CAI

DOI: https://doi.org/10.3321/j.issn:1004-924X.2007.07.014

2007-01-01

Abstract:A high speed and high precision displacement measurement method based on double grating scales was presented, and the signal's switching and merge of double grating scales was discussed based on the analysis of measuring theory of grating scale. By analysis of the subdivision error of Moire fringe, the error of the count impulse's switch process was decreased. A signal process circuit was designed using the programmable logic device-FPGA, and the feasibility of method was proved through the logical and timing simulation by the design software of FPGA. Experimental results show that while the maximum allowable moving speed of grating is grater than 1 m/s, the measurement resolution is 10 nm. It can satisfy the system requirements of high speed and high precision displacement measurement.
System to Verify Displacement and Vibration Based on DSP

Wang Jian,Lu Ping,He Bin,Yue Jiguang

DOI: https://doi.org/10.3321/j.issn:1671-4598.2006.06.047

2006-01-01

Abstract:A system is introduced to verify displacement and vibration based on DSP(TI TMS320LF2407A).The architecture of the system is shown,then the hardware part and software part are described in detail,especially how to select the IC components and how to design the software architecture.At last,an actual performance is given out according to analysis.
An Interference Signal Processing Method for Displacement Measurement by Dual Wavelength and Single Grating

Guochao Wang,Shuhua Yan,Dongxing Yang,Weihong Zhou,Xuedong Xie

DOI: https://doi.org/10.1117/12.904076

2011-01-01

Abstract:Displacement measurement by dual wavelength and single grating integrates the single grating diffraction theory and the heterodyne interference theory. By taking advantage of the two theories, it solves the contradiction between large range and high precision in grating displacement measurement quite well. In order to obtain nanometer resolution and nanometer precision, high-power subdivision of interference fringe must be realized accurately. According to phase demodulation theory for heterodyne interference signal, a digital phase measuring method is proposed by combining frequency-mixing technique and pulse-filling method. The whole signal processing part, which is based on FPGA and PLL, has been designed to realize the integer period measurement and high-powered subdivision of the decimal phase. Through experiments, it is validated that the phase range is [-180 degrees, 180 degrees], and the phase measurement resolution and the phase precision are above 0.03 degrees and 0.1 degrees, respectively. Moreover, the displacement measurement resolution and the displacement precision, corresponding to the phase indexes, are 0.167nm and 0.556nm, respectively.
A Displacement Measuring System Based on Grating Double Diffraction

Bo Zhao,Lei Wang,Mi-er Xu,Hong Zhao,Xiang-dong Liu

DOI: https://doi.org/10.1117/12.2182024

2015-01-01

Abstract:A displacement measuring system based on grating double diffraction is proposed in this paper to eliminate the impact of multiple reflections of the zero-order diffraction beam and to reduce the stray light coming from the interference field. The principle of the proposed system is that with the proper interference of the first order beam of second diffraction, a displacement transducer can be obtained via the Doppler frequency shift and phase decodi ng. Simulation tests are conducted using LightTools model to prove the effectiveness of the proposed system. And experiment results shows that a resolution of 20 nm can be achieved over a range of 25 mm. It is therefore concluded that the proposed system can be used to improve the measurement resolution and accuracy.
A Non-Contact Displacement Sensor with Diffraction Grating Metrology System for Profile Measurement

Yu Rong Chen,Xu Dong Yang,Tie Bang Xie

DOI: https://doi.org/10.4028/www.scientific.net/kem.364-366.74

2007-01-01

Key Engineering Materials

Abstract:Focus detection method is one of non-contact profile measurement methods. However, the measurement accuracy of current focus detection method is limited by voice coil motor adopted by it. In this paper, based on an improved Foucault focus detection method, a new non-contact displacement sensor with diffraction grating metrology system is presented. Driven by a piezoelectric actuator instead of a voice coil motor, and a diffraction grating metrology system being with it, the sensor has high measurement accuracy. During surface profile sampling, according to focusing deviation signal, the focusing lens was driven to move vertically by the piezoelectric actuator so that its focus was always located on the workpiece surface, synchronously the vertical displacement of the focusing lens was obtained by the diffraction grating metrology system as the profile height of sampling points. The displacements of all sampling points gave the whole profile of the measured surface, which can be processed by a characterization software to obtain the measurement result. The resolution of the non-contact displacement sensor was 10 nm.
Two-Degree-Of-Freedom Displacement Measurement System Based on Double Diffraction Gratings

Zhengang Lu,Peipei Wei,Chaoqun Wang,Jialei Jing,Jiubin Tan,Xiping Zhao

DOI: https://doi.org/10.1088/0957-0233/27/7/074012

2016-01-01

Abstract:A two-degree-of-freedom (2-DOF) displacement measurement system based on double diffraction gratings is proposed in this paper, which consists of a reflective-type scale grating and a grating read head with a scanning transmission grating. Combining the traditional three-grating interference principle with the Michelson interference principle, the system can measure the displacements of a precision stage along the horizontal direction (X-axis, in the scanning grating plane and vertical to the scanning grating lines) and vertical direction (Z-axis, vertical to the scanning grating plane) simultaneously. The system has the merits of compact structure and uncoupled interference signals in the two axes. By simulating the output signals of the system and comparing them with the experimental results, the validity and feasibility of the system have been verified. The 2-DOF system will be favorable in the displacement measurement of multi-dimensional stages and multi-DOF machines.
Large-scale range diffraction grating displacement sensor based on polarization phase-shifting

Mengwei Li,Zhouxin Liang,Rui Zhang,Qiannan Wu,Chenguang Xin,Li Jin,Kunyang Xie,Hongbo Zhao

DOI: https://doi.org/10.1364/AO.59.000469

IF: 1.9

2020-01-01

Applied Optics

Abstract:A method is proposed and demonstrated to improve a diffraction grating displacement sensor to simultaneously achieve nanometer-level resolution and an extended range of operation. The method exploits the polarization phase-shifting optical path to extract two sinusoidal signals with a quadrature phase shift. The interpolation circuit is applied to nonlinearly convert two sinusoidal signals into a standard incremental AB quadrature digital signal, implementing an extended operation range with the magnitude of a laser coherence length. This work enables displacement measurement operated at large-scale range, and provides a significant guide for the design of a high performance micro-displacement sensor. (C) 2020 Optical Society of America
A Novel High Speed/High Precision Displacement Measurement Method Using Double Grating Scales for a Macro/Micro Driven System: Principle Design and Experimental Verification

Degang Jie,Yanjie Liu,Lining Sun,Zhichao Chen,Hegao Cai

DOI: https://doi.org/10.1109/ROBIO.2006.340181

2006-01-01

Abstract:High speed and high precision displacement measurement is hard to be achieved because of the restriction of displacement sensors: the maximum allowable moving speed is in contradiction to the measuring accuracy. In order to enable the high precision displacement measurement of the ending to achieve high speed moving course, a high speed and high precision displacement measurement method based on double grating scales is presented. Based on the analysis of measuring theory of grating scale, the method of signal's switch and merge of double grating scales is discussed. By using the analysis of the subdivision error of Moire fringe, the error of the count impulse's switch process is decreased. The signal process circuit is designed by using the programmable logic device-FPGA. And through the logical and timing simulation by the design software of FPGA, the feasibility of method is proved. The experimental results verify that the method is effectively used to control a macro/micro driven system.
Optic Grating Sensor Based High Precision Straight-line Displacement Measurement and Its Error Analysis

Lei Dang,Bochen Bai,Songlin Wu,Qian Yang,Longfei Gao

DOI: https://doi.org/10.2991/SMONT-19.2019.48

2019-04-01

Abstract:To accomplish precision straight-line and angular displacement measurement, the principle and realizing methods on the basis of optical grating are analyzed in detail. A new quadruple frequency circuit and its relative analogous circuit are designed, including scaling circuit of optical grating sensor and display module. For realizing displacement measurement in nanometer-size, corresponding software system of type-51 single chip microcomputer as a control core has designed accordingly. Output display and optic grating signal processing in real-time are achieved. Finally, the error source of system is discussed and error analysis is carried out in this paper. The experimental results show that system can realize high precision measurement and can be used in fine measuring instrument for high precision displacement measurement. Keywords—optic grating; quadruple frequency circuit; displacement measurement

Physics,Engineering
Overview of 2D Grating Displacement Measurement Technology

Yin Yun-Fei,Liu Zhao-Wu,Jirigalantu,Yu Hong-Zhu,Wang Wei,Li Xiao-Tian,Bao He,Li Wen-Hao,Hao Qun

DOI: https://doi.org/10.37188/co.2020-0237

IF: 1.1

2020-01-01

Chinese Optics

Abstract:Ultra-precision displacement measurement technology is not only the basis of precision machining, but also plays a decisive role in the chip manufacturing industry that is rapidly developing in Moore's Law. The grating displacement measurement system based on the grating pitch is widely used in multidimensional measurement system. Compared with the laser displacement measurement system, grating displacement measurement system greatly reduces the environmental requirements for humidity, temperature and pressure. In this paper, the development status of the optical structure of displacement sensing system based on two-dimensional grating in recent years is introduced. The principles of zero-difference and heterodyne grating interferometrys are introduced. The optical structure based on single-block two-dimensional grating is reviewed. The development history of the optical structure in single-block two-dimensional grating to coupling designs of multi-block two-dimensional gratings is summarized, the advantages and disadvantages of several two-dimensional grating displacement measurement systems are compared and analyzed, and the development trend of two-dimensional grating displacement measurement system is prospected. The engineering process of two-dimensional grating displacement measurement system is summarized.
Design of Grating Displacement Measuring System Based on Single Chip Microcomputer

Wei Han,P. Yu,Q. Li

DOI: https://doi.org/10.4028/www.scientific.net/AMM.389.606

2013-08-01

Abstract:The thesis presents a set of design scheme of grating displacement measuring system by taking SCM (Single Chip Microcomputer) as the core component. It describes the system design principle and the design process of software and hardware in details, i.e. realizing standard TTL level signal output through the processing of grating output signal amplification, sub-dividing, modulation and driving, so that grating output signal could match the numerical control system. It turns out that the designed grating displacement measuring system is able to satisfy the requirement of high-speed sampling and storage and feasible to be used for the measurement of actual grating displacement. The system has a simple and compact structure and a lower price, and owns favorable practical performance.

Computer Science,Engineering
Precision Grating Displacement Transducer with an Image Sensor

XH YUAN,GL LU,TC ZHAO

DOI: https://doi.org/10.1117/12.156355

1993-01-01

Abstract:A special designed image sensor named as CG2O is used to receive the grating moire signal to form a phase-modulated signal, which is processed by digital dynamic phase discrimination and subdivision. High resolution and precision can be obtained. After describing the special image sensor in brief, the paper expounds the principle of the displacement transducer,which consists of a CG2O device, a grating couple of 25 LP/mm and a single chip microprocessor 8031 and so on. The measuring resolution is 0. 1 pm. This paper is valuable in development of a new type of precision displacement transducer with high resolution.

The Grating Displacement Measurement and Application Based On DSP

Research on Integrated Grating Subdividing Digital Display Device Based on DSP

A High-precision Displacement Measuring System in SPC

Development of Precise Displacement Measurement System Based on DSP

A High-Resolution Displacement Sensor Based on a Grating Interferometer with the Phase Modulation Technique

Nanometer-scale Displacement Sensor Based on Phase-Sensitive Diffraction Grating.

Study of Fiber Grating Displacement Sensor

Research on the Application of DSP in the Magnetostrictive Displacement Sensor

Interferometric Precision Displacement Measurement System Based on Diffraction Grating

A high speed and high precision displacement measurement method using double grating scales

System to Verify Displacement and Vibration Based on DSP

An Interference Signal Processing Method for Displacement Measurement by Dual Wavelength and Single Grating

A Displacement Measuring System Based on Grating Double Diffraction

A Non-Contact Displacement Sensor with Diffraction Grating Metrology System for Profile Measurement

Two-Degree-Of-Freedom Displacement Measurement System Based on Double Diffraction Gratings

Large-scale range diffraction grating displacement sensor based on polarization phase-shifting

A Novel High Speed/High Precision Displacement Measurement Method Using Double Grating Scales for a Macro/Micro Driven System: Principle Design and Experimental Verification

Optic Grating Sensor Based High Precision Straight-line Displacement Measurement and Its Error Analysis

Overview of 2D Grating Displacement Measurement Technology

Design of Grating Displacement Measuring System Based on Single Chip Microcomputer

Precision Grating Displacement Transducer with an Image Sensor